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Capacitance micro-machining ultrasonic sensor for measuring density and production method thereof

An ultrasonic sensor and density measurement technology, which is applied in the field of MEMS technology and liquid physical parameter testing, can solve the problems of low sensitivity and large sensor volume, and achieve stress matching, reliability and accuracy, reliability and The effect of measurement precision

Inactive Publication Date: 2012-02-15
XI AN JIAOTONG UNIV
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Problems solved by technology

There is a rectangular silicon micro-cantilever vibration sensor based on MEMS technology to measure liquid density. Under the conditions of high temperature 150°C and high pressure 68MPa, the density measurement accuracy is ±1%. However, since the silicon micro-cantilever has a rectangular structure, As a result, its sensitivity is not high; at the same time, due to the use of electromagnetic solenoids as the excitation device, the packaged sensor has a large volume

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  • Capacitance micro-machining ultrasonic sensor for measuring density and production method thereof
  • Capacitance micro-machining ultrasonic sensor for measuring density and production method thereof
  • Capacitance micro-machining ultrasonic sensor for measuring density and production method thereof

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Embodiment Construction

[0017] The capacitive microfabricated ultrasonic transducer (CMUT) and its preparation method for density measurement of the present invention are described in detail below in conjunction with the accompanying drawings:

[0018] The capacitive micromachining ultrasonic density sensor of the present invention is used to measure the density of fluid, realizes micro-measurement, satisfies on-line measurement, and has the advantages of short measurement time, high precision, good working stability and high reliability. The sensor includes a CMUT array unit, which sequentially includes a silicon dioxide stress matching layer 6, a silicon nitride insulating layer 5, a metal electrode 4, a silicon dioxide film 3 and a single crystal silicon substrate 1 from top to bottom, wherein , the metal electrode 4 is the upper electrode, the single crystal silicon substrate 1 is the lower electrode, the single crystal silicon substrate is provided with a cavity 2, the silicon dioxide film 3 seal...

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Abstract

The invention provides a capacitance micro-machining ultrasonic sensor for measuring density and a production method thereof. The capacitance micro-machining ultrasonic sensor comprises a monocrystalline silicon substrate, a cavity formed by corrosion arranged on the monocrystalline silicon substrate, a first silica thin layer arranged on the upper end surface of the monocrystalline silicon substrate and sealing the cavity, a metal electrode layer formed by sputtering on the silica thin layer, and a silicon nitride thin layer and a second silica thin layer formed by successively etching on the metal electrode layer. The sensor disclosed herein has the characteristics of insulation, corrosion resistance and high temperature resistance, and can guarantee the reliability of CMUT in different measurement environments and the measurement precision.

Description

technical field [0001] The invention relates to the technical fields of MEMS technology and liquid physical parameter testing, in particular to a capacitive micromachining ultrasonic sensor for density measurement and a preparation method thereof. Background technique [0002] At present, the liquid density sensors with mature technology and widely used in actual measurement mainly include: vibration type, radioisotope type, buoyancy type, static pressure type, gravity type, sound velocity type, etc. These traditional density sensors all have a common defect, that is, they cannot satisfy online measurement. When measuring the liquid density, it is necessary to extract the sample first and then measure it offline. However, due to the differences in temperature and pressure between the test environment and the actual working conditions, there will be a large error between the measured value of the density and the measured value of the actual environment. In addition, traditio...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N9/00B81B3/00B81C1/00
Inventor 赵立波李支康张桂铭黄恩泽王晓坡赵玉龙蒋庄德刘志刚
Owner XI AN JIAOTONG UNIV
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