Preparation method of double-structure suede transparent conducting oxide thin film of thin film cell
A technology of oxide thin film and thin film battery, which is applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problems that it is difficult for the thin film to have two sizes at the same time, and it is impossible to achieve scattering at the same time, so as to improve conversion efficiency, improve light absorption and Utilization, the effect of broadening the spectral range
Inactive Publication Date: 2013-03-27
BAODING TIANWEI GRP CO LTD
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Problems solved by technology
With the above two methods, although the size of the suede surface of the TCO film can be changed by adjusting the process parameters, it is difficult to make the film have two sizes of suede texture at the same time, that is, a double structure, so that it is impossible to realize the detection of visible light and near-infrared at the same time. light scattering
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[0017] The present invention proposes to prepare double-structure suede ZnO: the specific manufacturing process of Al transparent conductive film is as follows:
[0018] 1. First use the plasma to bombard the glass substrate, adjust the gas ionization voltage of the plasma, the ion focus voltage, the plasma beam current, and the vacuum degree of the plasma bombardment to form a textured surface on the glass surface;
[0019] 2. Using methods such as magnetron sputtering or low-pressure chemical vapor deposition or spin coating on the above-mentioned textured glass substrate to prepare ZnO:Al transparent conductive film;
[0020] 3. Wet-etch the prepared ZnO:Al transparent conductive film, and adjust the type, concentration, temperature, etching time, substrate movement speed and other parameters of the etching solution to obtain the desired shape and characteristic size. surface texture.
[0021] The present invention proposes to first process the glass substrate to obtain a ...
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The invention relates to a preparation method of a double-structure suede transparent conducting oxide thin film of a thin film cell, in particular to a double-structure suede transparent electrode which is suitable for a thin film solar cell, belonging to the technical field of transparent conducting oxide thin films. The technical scheme of the invention is as follows: the preparation method comprises the following steps of: treating a glass substrate to obtain a suede structure (the suede size is adjustable, such as the suede with larger size); then depositing a TCO (Transparent Conducting Oxide) thin film, wherein the film has a suede structure similar to that of the glass substrate; and obtaining a suede structure with another size (the suede size can be adjusted, such as the suede with smaller size) by wet etching, thereby obtaining the double-structure suede TCO thin film. The preparation method disclosed by the invention has the advantages of expanding the scattering capability of the TCO thin film on different wavebands of light, broadening the utilization of the solar spectrum on the cell and improving the conversion efficiency of the thin film cells.
Description
technical field [0001] The invention relates to a method for preparing a double-structure textured transparent conductive oxide film for a thin-film battery, in particular to a double-structured textured transparent electrode suitable for thin-film solar cells, and belongs to the technical field of transparent conductive oxide films. Background technique [0002] Under the circumstances of global warming, deterioration of the human ecological environment, and the danger of shortage of conventional energy sources, sustainable development strategies have been accepted by countries all over the world. Solar energy has the advantages of cleanness, safety, sufficient resources, and regeneration. It is one of the most important new energy sources in the 21st century. It has received attention and support from governments around the world. The photovoltaic industry has been developing at a rate of nearly 48% for five consecutive years. , As a result, the photovoltaic market has exp...
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IPC IPC(8): H01L31/20
CPCY02P70/521Y02P70/50
Inventor 贾海军冯燕张丽王辉麦耀华
Owner BAODING TIANWEI GRP CO LTD