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Antenna-coupled tellurium-cadmium-mercury terahertz detector

A terahertz detector and antenna coupling technology, applied in the field of terahertz detectors, can solve the problems of long response time and low working temperature of terahertz thermal detectors, achieve fast response time, increase signal-to-noise ratio, and improve coupling efficiency effect

Active Publication Date: 2013-08-14
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The invention proposes an antenna-coupled mercury cadmium telluride terahertz detector, which solves the problems of long response time and low working temperature of traditional terahertz thermal detectors, and at the same time significantly improves detection sensitivity and signal through antenna coupling. noise ratio and enables multi-detector integration

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Embodiment Construction

[0032] combined with figure 1 Further describe the invention.

[0033] Terahertz signal photon energy is less than mercury cadmium telluride Hg 1-x Cd x The semiconductor band gap of Te material cannot generate electron-hole pairs, and the energy is controlled by mercury cadmium telluride Hg 1-x Cd x After the free carriers in the Te material are absorbed, the free carriers are heated to change the recombination process, causing mercury cadmium telluride Hg 1-x Cd x The resistance value of the Te material changes, and the electrode layer significantly enhances the mercury cadmium telluride Hg 1-x Cd x The coupling of Te material to terahertz signal is connected with the amplification detection circuit through the wire, and the mercury cadmium telluride Hg 1-x Cd x The resistance value change of the Te material is converted into a voltage change and amplified and detected, thereby realizing the detection of the terahertz signal.

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Abstract

The invention discloses an antenna-coupled tellurium-cadmium-mercury terahertz detector, which has the advantages of high detection sensitivity, high response speed, compact structure, and capability of working at room temperature and being integrated on a large scale and is used for carrying out real-time detection imaging on terahertz signals. The detector is characterized in that: based on a hot carrier absorption effect of a narrow-gap semiconductor, a tellurium-cadmium-mercury material with proper composition is selected, a reasonable and feasible antenna coupling structure is designed, photoetching, etching and sputtering process are carried out, and signal reading-out is carried out by using a preamplifier circuit, thus detection of the terahertz signals is realized. The preparation process of the material used by the device disclosed by the invention is mature, and the detection of line array or array can be achieved.

Description

technical field [0001] The invention relates to a terahertz detector, in particular to an antenna coupled mercury cadmium telluride terahertz detector. Background technique [0002] The terahertz band usually refers to electromagnetic waves with a frequency in the range of 0.1THz-10THz (wavelength 3mm-30μm), which is located between millimeter waves and infrared rays. , Imaging, information and communication technology, secure communication, safety detection and other applications have great application potential, which greatly increases the research enthusiasm at home and abroad. In the development of terahertz technology, terahertz detectors are especially valued as the core component. Due to the low photon energy of terahertz waves (at a wavelength of 300μm, hv≈4.2meV, while the thermal energy at room temperature is about 26meV), at the same time Airy The spot (diffraction limit) is relatively large, making the spatial resolution of terahertz imaging systems lower than t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/08H01L31/0224H01L31/0352H01Q1/44
Inventor 黄志明陆金星黄敬国周炜沈学民魏彦峰侯云高艳卿褚君浩
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI