Suede-structured ZnO film prepared by alternative growth technology and application thereof

A technology of alternate growth and thin film, applied in the direction of gaseous chemical plating, coating, electrical components, etc., can solve the problems of affecting the transmittance of the thin film, reducing the texture, and reducing the light scattering ability of the thin film, so as to improve the photoelectric conversion efficiency, simple craftsmanship
CN102433545AInactive Publication Date: 2012-05-02NANKAI UNIV
1 Cites 6 Cited by

Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
NANKAI UNIV
Publication Date
2012-05-02
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention provides a suede-structured ZnO film prepared by an alternative growth technology. A suede-structured ZnO-TCO (transparent conductive oxide) film is alternatively grown on a glass substrate by a metal organic chemical vapor deposition method based on diethylzinc and water as source materials and hydrogen used for diluting and doping a gas borane B2H6. The steps are as follows: 1) firstly, growing a layer of undoped ZnO film on the glass substrate; 2), then growing a B-doped type ZnO film on the undoped ZnO film; and 3) repeating the steps 1) and 2), so as to obtain a multi-layer overlapping-grown ZnO film. The suede-structured ZnO film has the advantages that the direct growth of the suede-structured ZnO film on the glass substrate can be realized by using an MOCVD (metal oxide chemical vapor deposition) technology; the preparation method has simple process, and is convenient for large-area production and popularization; through the alternative growth technology compatible to the process technology, the light scattering of visible light and neat infrared regions and subsequent deposition of a silicon-based film are facilitated; and the suede-structured ZnO film can be applied to a film solar battery, thereby effectively improving the photoelectric conversion efficiency.
Need to check novelty before this filing date? Find Prior Art

Description

【Technical field】

[0001] The invention belongs to the field of transparent conductive oxide films, in particular to an alternate growth technique for preparing ZnO films with a suede structure and its application. 【Background technique】

[0002] Transparent conductive oxides (Transparent conductive oxides-TCO) thin film refers to the average transmittance of visible light (λ = 380 ~ 800nm) high (T ≥ 80%), low resistivity (ρ ≤ 10 -3 Ωcm) oxide film. The widely studied and applied TCO films are mainly F-doped SnO 2 : F thin film, Sn-doped In 2 o 3 :Sn(ITO) thin film and Al-doped ZnO:Al thin film. In the field of solar cell applications, due to ITO and SnO 2 The thin film is easily reduced and blackened in the hydrogen plasma environment, which leads to the deterioration of its optical properties, which becomes an obstacle to its application. In recent years, ZnO thin film has low cost, non-toxicity, easy photolithographic processing and good chemical stability in H plasm...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More