Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom

A conductive metal, optically transparent technology, used in chemical instruments and methods, metal layered products, metal material coating processes, etc., can solve problems such as weakening optical transmittance and increasing resistivity

Active Publication Date: 2012-05-23
3M INNOVATIVE PROPERTIES CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The formation of such condensations or islands reduces the optical transmission and leads to an increase in resistivity

Method used

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  • Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom
  • Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom
  • Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom

Examples

Experimental program
Comparison scheme
Effect test

example

[0058] Table 1

[0059] Materials used for examples

[0060]

[0061]All examples and comparative examples were prepared using a multi-zone vacuum chamber comprising a roll-to-roll web handling system, which allows for sequential coating and / or treatment processes, including plasma treatment, e-beam treatment, sputter coating and vapor coating. Typically, sequential coating is used to deposit up to three different materials in a single pass through the chamber. Web runs forward unless otherwise indicated. A schematic diagram of the coating system is shown in figure 2 , which is substantially the same as the coating system disclosed, for example, in FIG. 6A of US Patent No. 7,351,479 (Fleming et al.).

[0062] Test Method 1A: Optical Analysis

[0063] Measurements were performed on a BYK Gardner TCS PLUS Spectrophotometer Model 8870 (BYK Gardner Inc., USA) according to ASTM D 1003, E308, CIE 15.2. Percent transmission was measured from 380nm to 720nm using d / 8° g...

example 1

[0087] Example 1 - With SnO 2 layer and the Ag / Au conductive layer of the ZnO seed layer

[0088] The polyester web described in Comparative Example 1A was used. The webs were plasma treated as follows. The pressure of the vacuum chamber is reduced to 5×10 -5 support. Pass nitrogen at a flow rate of 65 sccm through the SnO 2 source is introduced into the vacuum chamber, resulting in a 3.7 x 10 -3 Torr pressure, SnO 2 The source is described in Comparative Example 1A. Plasma treatment was performed at a power of 1000 watts and a line speed of 50 fpm (15 m / min). A first acrylate layer was deposited on the plasma treated web using substantially the same materials and process conditions as described for the preparation of the first acrylate layer of Comparative Example 1A. The polyester web was run in reverse and the first SnO 2 layer with substantially the same materials and process conditions as described in the first sputter-coated SnO 2 layer.

[0089] on the ...

example 2

[0093] Example 2 - With SnO 2 Ag / Au conductive layer for pad layer and ZnO seed layer

[0094] Example 2 was prepared using substantially the same materials, process sequence and process conditions as described in Example 1, with the following modifications. An unprimed polyester web (available under the trade designation "TEIJIN TETORON HB3" from DuPont Teijin Films Ltd.) having a thickness of 2 mils (0.05 mm) and a width of 508 mm was loaded into the drum vacuum chamber. No second SnO deposited 2 layer. The second acrylate layer and the second ZnO / Al 2 o 3 The layers are deposited sequentially adjacent to each other. Additionally, a power level of 2200 watts was used when depositing the first Ag / Au metal alloy layer.

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Abstract

A process of forming optically clear conductive metal or metal alloy thin films is provided that includes depositing the metal or metal alloy film on a polycrystalline seed layer that has been deposited directly on a nucleation layer of metal oxide comprising zinc oxide. Also conductive films made by this process are provided. In some embodiments, the metal alloy thin films include silver / gold alloys.

Description

technical field [0001] Provides conductive metal or metal alloy films with high visible light transmission and low electrical resistance. These films are useful, for example, in electromagnetic interference (EMI) shielding and automotive applications. Background technique [0002] Optical films can be used in a variety of applications. These films are sometimes available with thin metal layers, such as silver. Optical films can be used in various configurations on supports such as glass or flexible substrates for a variety of purposes, such as solar control films, EMI shielding films, window films, and conductor films. These films can have high visible light transmission and, when metallized, low resistivity. [0003] There is a proportional relationship between the optical transmittance and resistivity of metals such as silver. This relationship makes the typical goal of forming films with both high visible light transmission and low resistivity form a microsecond balan...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05K9/00B32B15/01
CPCC23C14/024C23C14/086H05K9/0094C22C5/06C23C14/20C23C14/562C03C17/36C03C17/3644C03C17/366C03C17/3676B32B15/016F05B2280/20042B60B2310/6162
Inventor 克拉克·I·布莱特
Owner 3M INNOVATIVE PROPERTIES CO
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