Injection molding method of carbon fiber composite

Abstract

The invention discloses an injection molding method of a carbon fiber composite; an injection machine is cleaned with the proviso that a material cylinder volume of the injection machine is ensured to be 2-5 times of the material volume of a plastic part and a flow channel; a mold is made of heat-resistant tool steel, and the mold is polished with high precision; gating is performed by a mold type, and the gate has a thickness of 1-2 mm and a length of 3-4 mm; raw materials are dried at 150 DEG C for at least 3 hours, or dried at 160 DEG C for 2 hours, and then are injected at a material cylinder temperature of 385 DEG C-395 DEG C with an injection pressure of 120-140 MPa and a mold temperature of 185-220 DEG C, and molding is completed after heat preservation and pressure preservation for 30 seconds. Retaining rings prepared by the invention has consistent mechanical properties, no molten joint mark, and consistent abrasion resistance.

Description

technical field [0001] The invention belongs to the field of wafer chemical mechanical polishing processing, and in particular relates to a carbon fiber composite injection molding method. Background technique [0002] In wafer chemical mechanical polishing (CMP), due to the inhomogeneity of the force on the wafer surface, it is difficult to achieve the ideal precision on the polished wafer surface, especially the edge of the wafer due to the stress concentration, there will be edge "overgrinding" "Phenomenon, which reduces the quality of wafer polishing and wafer utilization. The larger the diameter of the wafer, the more serious the phenomenon of "overgrinding" on the edge of the wafer. At present, in order to solve the "over-grinding" phenomenon on the edge of the wafer, a retaining ring is added to the periphery of the wafer, which can hold the wafer when the wafer is planarized, determine the position of the wafer, produce a low grinding speed, and at the same time be a...

AI Technical Summary

Problems solved by technology

[0006] In order to overcome the shortcomings of inconsistent performance, low or inconsistent wear resistance, and fusion marks when forming CF / PEEK composite retaining rings by traditional injection molding methods, the present invention discloses an injection molding carbon fiber reinforced PEEK composite retaining ring The method can ensure that the injection molding CF / PEEK composite material for wafer processing is pollution-free, maintains consistent mechanical properties of the ring, no fusion marks, and consistent wear resistance, etc.