Manufacturing method of interconnection structure
A manufacturing method and hard mask layer technology, which are applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of decreased yield, increased difficulty of metal layers, failure of electrical connection of interconnect structures, etc. Small difficulty, the effect of avoiding the failure of electrical connection
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[0028] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0029] In the following description, many specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways than those described here, so the present invention is not limited by the specific embodiments disclosed below.
[0030] As described in the background, in the manufacturing method of the prior art interconnection structure, the hard mask layer is usually removed by wet cleaning method, and it is easy to form an oxide layer and a hard mask layer between the hard mask layer and the low-K dielectric layer. The concave surface surrounded by the low-K dielectric layer will increase the difficulty of filling the metal layer in the subsequent method.
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