Large-breadth microstructural processing system based on moving-iron electromechanical transducer and processing method thereof

Abstract

The invention discloses a large-breadth microstructural processing system based on a moving-iron electromechanical transducer and a processing method thereof. The large-breadth microstructural processing system mainly comprises a computer, a controller, the moving-iron electromechanical transducer, a main transmission mechanism, a feeding mechanism, a floating tool holder, a photoelectric encoderand a grating scale, the photoelectric encoder is connected with the main transmission mechanism, a diamond cutter and a diamond ruler are respectively installed on the moving-iron electromechanical transducer, the moving-iron electromechanical transducer is connected with the floating tool holder, the floating tool holder is respectively connected with the feeding mechanism and the grating scale, and the controller is respectively connected with the moving-iron electromechanical transducer, the main transmission mechanism, the feeding mechanism, the photoelectric encoder, the grating scale and the computer with a control program; the processing method adopts optical design software like TracePro and mechanical design software like Pro-E for microstructural design, so a design file is formed; the design file is converted and processed into track data; and the track data is converted into the control signal of the moving-iron electromechanical transducer, a main motor and a feed motor,and the control signal respectively loads and drives the moving-iron electromechanical transducer, the main motor and the feed motor. The large-breadth microstructural processing system has the characteristics of realization of processing and batch production of microstructural components, high processing precision, large breadth, fast speed and the like.

Description

technical field [0001] The invention relates to a large-scale microstructure processing system and a processing method based on a moving iron type electric-mechanical converter, and is mainly used in the processing and batch production of large-scale microstructure components. Background technique [0002] Micro-structured surfaces with surface accuracy of sub-micron level and surface roughness of nano-level are commonly found in micro-optical components, micro-sensors, micro-electronic components, etc., and have important application value and applications in military, aerospace, and civil industries. prospect. Microstructure processing methods in the prior art mainly include an etching method and a turning method based on Fast Tool Servo (FTS). Etching techniques such as ion exchange method and molten photoresist method are not suitable for processing microstructure elements with complex structures. [0003] The processing method based on fast tool servo can process comp...

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Problems solved by technology

[0004] The fast tool servo machining system of the prior art, such as the Nanoform 200 of Precitech Company, etc., installs the fast tool servo on the precision lathe as the auxiliary machining axis, and the processed surface is regarded as a base surface (that is, a surface of revolution, including symmetrical and asymmetrical surfaces). ) and the microstructure on the base surface. The trajectory of the base surface is realized by the CNC program of the precision lathe driving the feed direction and the slide plate in the feed direction. The microstructure is realized by the fast tool servo. This system can only process the workpiece. End face, the workpiece surface that can be processed is small

However, the currently widely used microstructure components (such as backlight modules in liquid crystal displays, etc.) have a large format, and the existing technology has been unable to meet its production requirements.

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