Multi-section-type FP (FabryPerot) cavity single wavelength laser based on deeply etched grooves
A deep etching, laser technology, applied in lasers, laser parts, semiconductor lasers, etc., can solve the problem of device wavelength deviation from the design wavelength, etc., and achieve the effect of narrow laser line width, less energy loss, and small manufacturing error.
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[0028] Figure 4 It is an embodiment of the present invention, and its structure includes a laser waveguide 11, a first deeply etched reflective surface 21, a second deeply etched reflective surface 22 located at both ends of the laser waveguide 11, and a deeply etched groove array 31 distributed therebetween.
[0029] The deep etched groove array 31, the first deeply etched reflective surface 21 and the second deeply etched reflective surface 22 are the key structures of the present invention, wherein the deeply etched groove array 31 includes the first deeply etched groove 301, the second deeply etched groove 302 and the clip 0~4 deeply etched grooves between them. The above-mentioned structures are all fabricated by ICP deep etching process, and the sidewalls are required to be smooth and vertical and the etching depth exceeds the quantum well layer 5 to ensure sufficient feedback and ensure that most of the energy in the cavity propagates in the direction of the horizontal...
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