Optical disk coating control method
A control method and optical disc technology, which is applied in the manufacture of optical record carriers, sputtering coating, ion implantation coating, etc., can solve the problems of wasting coating materials and relatively poor uniformity, so as to improve the flatness and save coating materials Effect
Inactive Publication Date: 2012-07-11
浙江华虹光电集团有限公司
View PDF3 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
The advantage is that the structure is simple; the disadvantage is that the coating material is wasted and the relative uniformity is not good
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0018] The present invention will be further described below in conjunction with the drawings and embodiments.
[0019] The optical disc coating control method provided by the present invention includes the following steps: a) placing the substrate and the target material in parallel in a vacuum chamber; b) evacuating to 2×10 -4 mbar; c) Inject argon gas, and the vacuum pressure is controlled at 3×10 -3 To 8×10 -3 mbar; d) Use 500-800V DC high voltage to ionize argon; e) The ionized plasma bombards the target along the magnetic field track, so that the target surface components are sputtered out in the form of atomic groups or molecules, and finally deposited on A thin film is formed on the surface of the substrate; f) An electromagnetic coil 6 is added outside the vacuum chamber, and a controlled current is passed through the electromagnetic coil 6 to change the intensity and spatial distribution of the magnetic field, thereby changing the spatial distribution of high-energy ions ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses an optical disk coating control method. The method comprises the following steps: a) placing a substrate and a target material in a vacuum chamber in a relatively parallel manner; b) vacuumizing to 2*10<-4>mbar; c) introducing argon, controlling the vacuum pressure at 3*10<-3>-8*10<-3>mbar; d) utilizing 500-800V of high direct voltage to ionize argon; e) using the plasma formed through ionization to bombard the target material along the magnetic-field trajectory to ensure that the surface components of the target material is sputtered in the form of atomic groups or molecules and are finally deposited on the surface of the substrate to form a film; and f) installing an electromagnetic coil outside a sputtering cathode to change the intensity and spatial distribution of the magnetic field and then change the interval distribution of high-energy ions in space, and repeating the step e) and the step f) until a uniform coating is formed. The optical disk coating control method provided by the invention adopts an adjustable magnetic field; and through repeated coating, the sputtering uniformity can be controlled and the evenness of the optical disk coating layer can be increased.
Description
Technical field [0001] The invention relates to a coating control method, in particular to an optical disc coating control method. Background technique [0002] Digital Versatile Disc (DVD for short) is a kind of optical disc storage, usually used to play movies of standard TV definition, high-quality music, and large-capacity storage of data. [0003] Optical disc coating generally uses vacuum sputtering, that is, when high-energy particles are used to bombard the solid surface, the particles on the solid surface can gain energy and escape the surface to be deposited on the substrate. Sputtering phenomenon began to be used in coating technology in 1870, and gradually used in industrial production after 1930 due to the increase in deposition rate. Usually the material to be deposited is made into a plate-a target, which is fixed on the cathode. The substrate is placed on the anode facing the target surface, a few centimeters away from the target. After the system is pumped to a ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/54G11B7/26
Inventor 唐翔黄灏
Owner 浙江华虹光电集团有限公司