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Method for rapidly processing graphical surface of ultralong grating ruler rolling die

A surface pattern and processing method technology, applied in the field of lithography, can solve the problems of high environmental condition dependence, high cost, low manufacturing efficiency, etc., and achieve the effect of reducing manufacturing cost, high production efficiency, and low external environment requirements

Inactive Publication Date: 2012-07-11
XI AN JIAOTONG UNIV
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  • Abstract
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Problems solved by technology

[0006] The purpose of the present invention is to provide a rapid processing method for super-long grating scale rolling mold patterning, which provides a good premise for the processing of the master grating mold, and the method of roller embossing can be used through the master grating rolling mold The long grating ruler for processing machine tools overcomes the shortcomings of high environmental condition dependence, low manufacturing efficiency, and high cost in traditional grating manufacturing

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  • Method for rapidly processing graphical surface of ultralong grating ruler rolling die
  • Method for rapidly processing graphical surface of ultralong grating ruler rolling die
  • Method for rapidly processing graphical surface of ultralong grating ruler rolling die

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Embodiment Construction

[0038] The present invention will be further described below through the accompanying drawings and specific implementation examples.

[0039] see Figure 1 to Figure 5 As shown, the specific implementation of the method for rapid processing of the surface patterning of the ultra-long grating scale rolling mold of the present invention is realized through the following steps. The method includes the following steps:

[0040] The first step is to select a suitable rolling die: choose cylindrical metal copper, Invar, etc. or choose non-metallic cylindrical quartz blank material as the material of rolling die 7; the diameter of rolling die 7 is Φ50mm~Φ500mm, and the length 50mm-500mm, after traditional mechanical turning, milling and grinding, the surface roughness Ra of the rolling mold 7 is less than 1.6, and the errors of roundness and cylindricity are less than or equal to 0.01mm;

[0041] The second step, cleaning of the surface of the rolling mold: first immerse the rollin...

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Abstract

The invention discloses a method for rapidly processing a graphical surface of an ultralong grating ruler rolling die. The method comprises the following steps: 1) selecting a rolling die; 2) cleaning the rolling die; 3) carrying out gluing on the surface of the rolling die; 4) carrying out pre-baking treatment on the rolling die; 5) fixing the rolling die; 6) selecting and adjusting a mask; and 7) carrying out exposure. According to the invention, through adopting a rotational exposure technique for exposure splicing, a graph of a grating microstructure on the mask is transferred to a photoresist on the surface layer of the rolling die, and after an operation of development is performed, a graphical grating-structure masking layer is formed on the surface of the rolling die; through using an etching or electroforming method, the graphical masking layer is copied to the surface of the rolling die; and through the application of the die, the grating microstructure on the surface of the die can be continuously copied to a grating ruler blank by using a rolled printing or inverted rolled printing method so as to realize the continuous manufacturing of an ultralong grating ruler. The method has low requirements on the external environment and is high in production efficiency, thereby effectively reducing the manufacturing cost of the grating rule.

Description

【Technical field】 [0001] The invention relates to photolithography technology in microfabrication, in particular to a rapid processing method for patterning the surface of a super-long grating ruler rolling mold for manufacturing machine tools. 【Background technique】 [0002] With the development of CNC machine tools and the advancement of technology, CNC machine tools are required to achieve higher precision and higher production efficiency in production. As an important part of the position detection device in CNC machine tools, the grating scale directly affects the machining accuracy of the machine tool. Therefore, in order to improve the machining accuracy of the machine tool, the grating ruler must have high resolution and positioning accuracy. [0003] The processing methods of ultra-long grating rulers for machine tools generally include mechanical scribing, holographic grating technology and photolithography technology, or the method of making a master grating and u...

Claims

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Application Information

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IPC IPC(8): G03F7/00G03F7/20
Inventor 刘红忠冯龙史永胜尹磊蒋维涛王良军刘树林李烜杨俊丁玉成卢秉恒
Owner XI AN JIAOTONG UNIV
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