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Filament for electron gun and method for producing same

A manufacturing method and electron gun technology, which are applied in the manufacture of thermionic cathodes, solid thermionic cathodes of discharge tubes, circuits, etc., can solve the problems of increased filament cost, and achieve the effects of improving accuracy, suppressing filament deformation, and prolonging average lifespan.

Active Publication Date: 2015-03-04
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method additionally requires an insulator, leading to an increase in the cost of maintaining the filament
[0010] As described above, there is still room for improvement in solving the deformation caused by the heating of the above-mentioned filament or the countermeasures for problems caused by the deformation.

Method used

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  • Filament for electron gun and method for producing same
  • Filament for electron gun and method for producing same
  • Filament for electron gun and method for producing same

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Embodiment Construction

[0046] Below, refer to figure 2 and image 3 , an embodiment in which the manufacturing method of the filament 1 for an electron gun according to the present invention is embodied will be described.

[0047] figure 2 It shows the three-dimensional structure of the filament 1 for electron guns manufactured by the manufacturing method of this embodiment. Such as figure 2 As shown, the filament 1 for an electron gun is a wire member whose outer peripheral surface is composed of four surfaces and is made of a refractory metal such as tungsten and has a rectangular cross-section. The filament 1 for an electron gun has a concave-convex curve-shaped meander 1a composed of three continuous meanders 1c on a virtual plane Pi including one surface (cathode-facing surface 1s) constituting the outer peripheral surface. A pair of linear leg portions 1b extending in the normal direction of the cathode facing surface 1s are bent and formed on both ends in the direction in which the above-...

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Abstract

Disclosed is a method for producing a filament (1) that is used in an electron gun (10), which comprises a step of preparing a plate material (P) that is composed of a metal material and a step of cutting a wire (P1) that has at least one bend (1c) out of the plate material (P). The wire (P1), which has been cut out of the plate material (P) by the production method, has a rectangular cross section.

Description

technical field [0001] The present invention relates to a filament for an electron gun and a manufacturing method thereof. The electron gun is used as a heating source in, for example, a melting furnace or a vapor deposition device, and the filament is installed on the electron gun to heat a cathode electrode as an electron beam generating source. Background technique [0002] Conventionally, as an electron gun for emitting electron beams, for example, a Pierce type electron gun described in Patent Document 1 is known. Generally, in a Pierce electron gun, thermoelectrons are emitted from a filament heated by Joule heat of an alternating current, and a cathode electrode to which a positive voltage is applied to the filament is heated by the thermoelectrons and thermal radiation from the filament. Thereby, thermal electrons are released from the cathode electrode. Then, the thermal electrons emitted from the cathode electrode are concentrated by the electric field formed by t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J9/04C23C14/30H01J1/15H01J37/06
CPCC23C14/30H01J9/04H01J1/16H01J1/15H01J37/06
Inventor 饭岛荣一池田裕人久保田幸雄
Owner ULVAC INC