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Coherent control array structure of micro lens integrated VCSELs (Vertical-Cavity Surface-Emitting Lasers)

A technology of vertical cavity surface emission and array structure, applied in lasers, laser parts, semiconductor lasers, etc., can solve the problems of low coherence of devices and large divergence angle of outgoing light, and achieve improved coherence, quality and good space. and temporal coherence effects

Inactive Publication Date: 2012-10-03
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] After the existing surface emitting laser adopts the metal grid reflective modulation technology, the divergence angle of the outgoing light is too large, usually with a divergence angle of more than 15°, so the coherence of the devices in the array will be very low

Method used

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  • Coherent control array structure of micro lens integrated VCSELs (Vertical-Cavity Surface-Emitting Lasers)
  • Coherent control array structure of micro lens integrated VCSELs (Vertical-Cavity Surface-Emitting Lasers)
  • Coherent control array structure of micro lens integrated VCSELs (Vertical-Cavity Surface-Emitting Lasers)

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Embodiment Construction

[0013] The structure of the present invention will be further described in detail below in conjunction with the embodiments given in the accompanying drawings.

[0014] like figure 1 , figure 2 As shown, the coherent control array structure of the microlens integrated vertical cavity surface emitting laser of the present invention includes a plurality of microlens integrated vertical cavity surface emitting lasers, and each microlens integrated vertical cavity surface emitting laser is an n-plane electrode 1 from top to bottom , substrate 2, buffer layer 3, n-type DBR layer 4, passivation layer 5, active region (from top to bottom the active region includes upper space layer 6-1, gain medium layer 7 and lower space layer 6-2 ), p-type DBR layer 9, ohmic contact layer 10 and metal grid electrode 11; the substrate 2 is etched into microlenses 12;

[0015] combine figure 1 The growth process of each single tube structure in the coherent control array structure of the microlen...

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Abstract

The invention provides a coherent control array structure of micro lens integrated VCSELs (Vertical-Cavity Surface-Emitting Lasers), which belongs to the technical field of semiconductor optical electronics and aims at increasing the coherence degree of the existing high-power VCSEL light beam. The coherent control array structure of the micro lens integrated VCSELs, provided by the invention, comprises multiple micro lens integrated VCSELs, wherein each micro lens integrated VCSEL is formed by an n-surface electrode, a substrate, a buffer layer, an n-type DBR (Distributed Bragg Reflector) layer, an active area, an oxidation limit layer, a p-type DBR layer, an ohm contact layer and a metal grid electrode from top to bottom, the upper surface of the substrate is corroded into a micro lens, and a passivating layer is arranged from the active area down to two sides of the metal grid electrode. The coherent control array structure provided by the invention is a high-power VCSEL array which is coherently coupled and output between array units, has a good light beam coherence, and has a potential value in application fields such as laser detecting, laser radar imaging, laser processing, laser controlling and laser weapons.

Description

technical field [0001] The invention belongs to the technical field of semiconductor optoelectronics, and in particular relates to a coherent control array structure of a microlens integrated vertical cavity surface emitting laser. Background technique [0002] Vertical Cavity Surface Emitting Lasers (VCSELs) and arrays are semiconductor lasers that emit light from vertical surfaces, and are a breakthrough in the integration of photonics devices. The microcavity effect makes its spontaneous emission factor several orders of magnitude higher than that of edge-emitting lasers, and many physical properties are greatly improved, such as the output light is a circular spot without astigmatism, and the beam shaping system is simple; large-area, high-density integrated arrays The microlens array performs simple shaping. The laser cavity surface damage threshold is high, and the laser power density is high. The heat dissipation structure is simple and compact, and it is easy for t...

Claims

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Application Information

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IPC IPC(8): H01S5/042H01S5/026
Inventor 张祥伟宁永强秦莉刘云王立军
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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