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Method for manufacturing soft silicon-based thin film solar cell integrated component

A silicon-based thin film and solar cell technology, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of expensive wires and equipment, and achieve the effects of reducing difficulty, improving reliability, and protecting areas

Inactive Publication Date: 2013-01-02
SHANGHAI INST OF SPACE POWER SOURCES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the metal wire bonding technology is currently monopolized by a few large foreign companies. The wire is expensive, and the wiring hot-pressing process is very special. The equipment to realize this process is also very expensive, and it has strict commercial technology confidentiality.

Method used

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  • Method for manufacturing soft silicon-based thin film solar cell integrated component
  • Method for manufacturing soft silicon-based thin film solar cell integrated component
  • Method for manufacturing soft silicon-based thin film solar cell integrated component

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Embodiment Construction

[0022] The present invention will be further elaborated below in conjunction with the accompanying drawings and specific embodiments. These examples should be understood as only for illustrating the present invention but not for limiting the protection scope of the present invention. After reading the contents of the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent changes and modifications also fall within the scope defined by the claims of the present invention.

[0023] 1. A roll of flexible polyimide (thickness 125um) is sequentially passed through the vacuum chamber, and the Ag / ZnO back reflection layer is grown by magnetron sputtering, the Ag thickness is 300nm, and the ZnO thickness is 500nm; the amorphous silicon nip structure, the n layer is 30nm, i layer 300nm, p layer 15nm, ITO transparent conductive film, ITO thickness 80nm. The vacuum chamber adopts cover plate, baffle or other te...

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Abstract

The invention discloses a method for manufacturing a soft silicon-based thin film solar cell integrated component. The method includes that a composite back reflection bottom electrode, a silicon-based thin film layer and a transparent electric conduction layer are manufactured by a vacuum method, a laser scribing process and a screen printing process are combined, and finally the soft silicon-based thin film solar cell integrated component is obtained. According to the method for manufacturing the soft silicon-based thin film solar cell integrated component, the laser scribing and the screen printing are performed after the vacuum plating process is finished, the pollution of the antivacuum process to the vacuum process is prevented, the substrate can be directly etched by the laser scribing, the difficulty is small, and the method is easy to implement, the grid line is manufactured by relatively simple screen printing process, and the interconnection is achieved. Besides, the manufacturing difficulty of the soft silicon-based thin film solar cell integrated component is greatly reduced, the cost is low, and the industrial production is easy to achieve.

Description

technical field [0001] The invention relates to the technical field of thin-film solar cells in new energy sources, in particular to a preparation method of a flexible thin-film solar cell integrated component. Background technique [0002] Energy is the driving force for the development of a country. In an era when fossil energy is becoming increasingly exhausted, research on new alternative energy will be a guarantee for the sustainable development of the national economy and a symbol of national strength. The invention relates to a preparation technology of flexible thin-film solar cell integrated components, which can improve the photoelectric conversion efficiency and yield of solar cells and reduce costs, and belongs to the technical field of thin-film solar cells in new energy. [0003] At present, the integrated inline technology of silicon-based thin-film solar cells on glass substrates is relatively mature and widely used in industrial production. Due to the poor...

Claims

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Application Information

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IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 陈亮马宁华叶晓军刘成张梦炎
Owner SHANGHAI INST OF SPACE POWER SOURCES
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