Method for manufacturing soft silicon-based thin film solar cell integrated component

A silicon-based thin film and solar cell technology, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of expensive wires and equipment, and achieve the effects of reducing difficulty, improving reliability, and protecting areas
CN102856425AInactive Publication Date: 2013-01-02SHANGHAI INST OF SPACE POWER SOURCES
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SHANGHAI INST OF SPACE POWER SOURCES
Publication Date
2013-01-02
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a method for manufacturing a soft silicon-based thin film solar cell integrated component. The method includes that a composite back reflection bottom electrode, a silicon-based thin film layer and a transparent electric conduction layer are manufactured by a vacuum method, a laser scribing process and a screen printing process are combined, and finally the soft silicon-based thin film solar cell integrated component is obtained. According to the method for manufacturing the soft silicon-based thin film solar cell integrated component, the laser scribing and the screen printing are performed after the vacuum plating process is finished, the pollution of the antivacuum process to the vacuum process is prevented, the substrate can be directly etched by the laser scribing, the difficulty is small, and the method is easy to implement, the grid line is manufactured by relatively simple screen printing process, and the interconnection is achieved. Besides, the manufacturing difficulty of the soft silicon-based thin film solar cell integrated component is greatly reduced, the cost is low, and the industrial production is easy to achieve.
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Description

technical field

[0001] The invention relates to the technical field of thin-film solar cells in new energy sources, in particular to a preparation method of a flexible thin-film solar cell integrated component. Background technique

[0002] Energy is the driving force for the development of a country. In an era when fossil energy is becoming increasingly exhausted, research on new alternative energy will be a guarantee for the sustainable development of the national economy and a symbol of national strength. The invention relates to a preparation technology of flexible thin-film solar cell integrated components, which can improve the photoelectric conversion efficiency and yield of solar cells and reduce costs, and belongs to the technical field of thin-film solar cells in new energy.

[0003] At present, the integrated inline technology of silicon-based thin-film solar cells on glass substrates is relatively mature and widely used in industrial production. Due to the poor...

Claims

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