Unlock instant, AI-driven research and patent intelligence for your innovation.

Device for testing temperature characteristic of pressure sensor

A pressure sensor, temperature characteristic technology, applied in the direction of measuring device, force/torque/work measuring instrument calibration/test, measurement of fluid pressure, etc. Achieve the effect of uniform heating, high reliability and simple structure

Active Publication Date: 2013-01-09
上海邦芯物联网科技有限公司
View PDF6 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The test system of this solution is bulky, relatively scattered, not integrated enough, and it is not easy to form a fully automated system; in addition, this solution takes a long time to balance the temperature of the test environment, which affects test efficiency

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Device for testing temperature characteristic of pressure sensor
  • Device for testing temperature characteristic of pressure sensor
  • Device for testing temperature characteristic of pressure sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Such as figure 1 As shown, the test device for the temperature characteristics of the pressure sensor includes: an upper cover plate 101, a base plate 102, a temperature controller 103 and a control computer 104. The upper cover plate 101 and the bottom plate 102 are assembled to form one or more airtight chambers. After the high-pressure gas is connected, the control computer 104 and the temperature controller 103 apply voltage to the semiconductor chip 105 to control the airtight chamber to reach the set temperature.

[0024] In this embodiment, the electrical connector 111 is a 6-hole needle seat that passes through the hollow boss structure 113 of the upper cover 101 , and the relative positions of the pinholes match the pins of the pressure sensor 112 to be tested. When the pressure sensor 112 to be tested is tested, the electrical connector 111 of the pressure sensor 112 to be tested and the upper cover 101 is first connected, and then the upper cover 101 and the ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a device for testing a temperature characteristic of a pressure sensor. The device comprises an upper cover board, a base board, a temperature controller and a control computer, wherein one or more sensor positioning grooves which are matched with the pressure sensor to be tested in shape, size and depth are formed in the upper surface of the base board; hollow boss structures arranged on the inner surface of the upper cover board and the sensor positioning grooves in the base board form one or more closed cavities; one or more gas channels are embedded in the base board structure below the sensor positioning grooves; the sensor positioning grooves are communicated with one another through the gas channels; and semiconductor sheets are embedded into the bottoms of the sensor positioning grooves and are used for heating or refrigerating.

Description

technical field [0001] The invention relates to a testing device for a micro-electromechanical device, in particular to a testing device for the temperature characteristic of a pressure sensor. Background technique [0002] The test of the pressure sensor usually includes repeatability, linearity, sensitivity, hysteresis characteristics, zero bias, zero bias stability, zero temperature drift, sensitivity temperature coefficient, full scale temperature coefficient and other items. This requires not only providing pressure excitation for the pressure sensor when testing the pressure sensor, but also providing a controllable high and low temperature environment at the same time. However, limited by the conditions of the test equipment, in many cases, the development and application units of the pressure sensor cannot provide the device with a pressure environment and a changing temperature environment at the same time in the process of testing the sensor device, so it is imposs...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01L25/00G01L27/00
Inventor 赵敏秦毅恒谭振新张昕明安杰罗九斌
Owner 上海邦芯物联网科技有限公司