High-sensitivity SERS (surface enhanced Raman scattering) sensor active-substrate for drug detection and preparation method thereof

An active substrate and substrate technology, which is applied in the field of laser Raman spectroscopy and trace drug detection, can solve the problems affecting the detection sensitivity, performance and difficulties of the drug detection system, and achieve significant enhancement effect, low cost and high repeatability Effect

Active Publication Date: 2013-01-23
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI +1
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  • Application Information

AI Technical Summary

Problems solved by technology

The quality of the active substrate can lead to a difference in the detection concentration level of even more than 10,000 times, which will greatly affect the detection sensitivity and performance of the drug detection system
The active basal SERS enhancement factors reported today are basically in the range of 10 6 Level, there are still some difficulties in ultra-sensitive detection of trace drugs

Method used

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  • High-sensitivity SERS (surface enhanced Raman scattering) sensor active-substrate for drug detection and preparation method thereof
  • High-sensitivity SERS (surface enhanced Raman scattering) sensor active-substrate for drug detection and preparation method thereof
  • High-sensitivity SERS (surface enhanced Raman scattering) sensor active-substrate for drug detection and preparation method thereof

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preparation example Construction

[0026] The preparation method of the SERS active silver substrate with surface Raman scattering activity proposed by the present invention comprises the following steps:

[0027] (1) Magnetron sputtering (ULVAC, MPS-2000-HC3 type) is used to plate a silver film on the substrate, and a 99.99% high-purity silver target is sputtered in high-purity (99.995%) argon gas. The substrate was ultrasonically cleaned in ethanol for 15 minutes before sputtering, and the working vacuum was 2×10 -6 Pa, the thickness of the silver film can be controlled from 100nm to 1000nm by adjusting the sputtering time.

[0028] (2) Evaporate a carbon film layer on the silver film layer as an "inducing template" to induce the formation of pyramidal nanostructures, and its thickness is controlled at about 100nm.

[0029](3) Put the above-mentioned substrate coated with silver film and carbon film into an ion beam system equipped with an ultra-high vacuum and a Kaufmann-type ion gun. Among them, the 600eV...

Embodiment 1

[0032] (1) Magnetron sputtering (ULVAC, MPS-2000-HC3) is used to plate a silver film on the substrate, and a 99.99% high-purity silver target is sputtered in high-purity (99.995%) argon gas. The substrate was ultrasonically cleaned in ethanol for 15 minutes before sputtering, and the working vacuum was 2×10 -6 Pa, the sputtering time is 200s, and the silver film thickness is 200nm.

[0033] (2) Evaporate a carbon film layer on the silver film layer as an "inducing template" to induce the formation of pyramidal nanostructures, and its thickness is controlled at about 100nm.

[0034] (3) Put the above-mentioned substrate coated with silver film and carbon film into an ion beam system equipped with an ultra-high vacuum and a Kaufmann-type ion gun. Among them, the 600eV argon ion beam is focused into a microbeam with a diameter of 380um, and its average ion current density is 220uA / cm 2 . The angle between the ion beam and the sample surface can be adjusted to 45 degrees by cha...

Embodiment 2

[0037] (1) Magnetron sputtering (ULVAC, MPS-2000-HC3) is used to plate a silver film on the substrate, and a 99.99% high-purity silver target is sputtered in high-purity (99.995%) argon gas. The substrate was ultrasonically cleaned in ethanol for 15 minutes before sputtering, and the working vacuum was 2×10 -6 Pa, the sputtering time is 300s, and the silver film thickness is 300nm.

[0038] (2) Evaporate a carbon film layer on the silver film layer as an "inducing template" to induce the formation of pyramidal nanostructures, and its thickness is controlled at about 100nm.

[0039] (3) Put the above-mentioned substrate coated with silver film and carbon film into an ion beam system equipped with an ultra-high vacuum and a Kaufmann-type ion gun. Among them, the 600eV argon ion beam is focused into a microbeam with a diameter of 380um, and its average ion current density is 220uA / cm 2 . The angle between the ion beam and the sample surface can be adjusted to 45 degrees by cha...

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Abstract

The invention belongs to the technical field of laser-Raman spectrum and trace drug detection, and in particular relates to a high-sensitivity SERS (surface enhanced Raman scattering) sensor active-substrate for drug detection and a preparation method thereof. The invention provides a SERS active-substrate, the SERS active-substrate is a precious metal nano cone array structure coated on a chip, and the precious metal material is silver and/or gold. The invention also provides a method for preparing the SERS active-substrate by using an argon ion impact method. The high-sensitivity SERS sensor active-substrate disclosed by the invention has surface enhanced Raman activity and is high in repetition rate, and can be applied to the detection of trace compounds such as drugs and explosives and the like.

Description

technical field [0001] The invention belongs to the technical field of laser Raman spectroscopy and trace drug detection, and in particular relates to a high-sensitivity SERS sensor active substrate for detecting drugs and a preparation method thereof; more specifically, the invention relates to a surface-enhanced Raman Active, high repetition rate, high-sensitivity SERS sensor active substrate that can be used for detection of trace compounds such as drugs, explosives, etc., and a preparation method thereof. Background technique [0002] As a common method for analyzing molecular vibrational spectra, laser Raman technology has been widely used in the fields of identifying the molecular structure of substances and analyzing the surface binding state. However, the Raman effect signal is often very weak. When the concentration of the measured molecule is small, or when the surface adsorbed substance is detected, the conventional laser Raman method appears to be unable to do wh...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B15/04G01N21/65
Inventor 杨勇黄政仁野上政行钟村荣
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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