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Crystalline silicon solar cell mask manufacturing device

A solar cell and crystalline silicon technology, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of uncontrollable temperature and the influence of silicon dioxide film compactness, etc., and achieve the effect of dense structure and uniform film layer

Active Publication Date: 2013-02-13
DONGFANG HUANSHENG PHOTOVOLTAIC (JIANGSU) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the prior art equipment for making masks for crystalline silicon solar cells, oxygen is directly passed into the reaction chamber, and the temperature of the oxygen is uncontrollable, which affects the compactness of the prepared silicon dioxide film

Method used

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  • Crystalline silicon solar cell mask manufacturing device

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Experimental program
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Effect test

Embodiment 1

[0017] After the silicon wafer is sent into the reaction chamber 9, the temperature of the reaction chamber 9 is raised to 790 degrees Celsius, and the nitrogen gas introduced from the small flow nitrogen gas inlet 2 passes through the phosphorus source output device 4, and enters the reaction chamber 9 after carrying liquid phosphorus oxychloride with a flow rate of 1000 sccm , deposited on the surface of the silicon wafer to form surface diffusion, the oxygen inlet 3 leads to an oxygen flow rate of 9000 sccm, passes into the deionized water device 5 to form a humid atmosphere, and acts as an oxidation after passing into the reaction chamber 9, so that the silicon containing phosphorus atoms on the surface After being oxidized, a uniform silicon dioxide mask layer is formed, and the reaction waste gas is purged with nitrogen gas from the large-flow nitrogen gas inlet 1 for 10 minutes, and the waste gas exhaust pipe 8 is discharged.

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Abstract

The invention discloses a crystalline silicon solar cell mask manufacturing device. The crystalline silicon solar cell mask manufacturing device comprises a reaction cavity, a phosphorus source output device and a constant temperature heating device and is characterized by further comprising a deionized water device, wherein the deionized water device is arranged above the constant temperature heating device. The crystalline silicon solar cell mask manufacturing device has the advantages that the deionized water device is arranged above the constant temperature heating device, the internal temperature of the deionized water device is controlled by a temperature controller, phosphorus diffusion and surface oxidation can be carried out on silicon wafers under moist environment by means of the crystalline silicon solar cell mask manufacturing device, and therefore a silica mask layer formed on surfaces is structurally compact and uniform and can effectively prevent secondary diffusion of a phosphorus source. Waste gas after reaction is exhausted through an exhaust pipeline.

Description

technical field [0001] The invention relates to a mask-making device for a solar cell, in particular to a device for making a silicon dioxide mask for a crystalline silicon solar cell. Background technique [0002] In recent years, competition in the photovoltaic industry has been fierce. One of the important ways to improve the competitiveness of the industry is to improve the conversion efficiency of solar cells. Various companies in the industry use various means to improve battery efficiency, among which the selective emitter battery has become the main technical means adopted by each enterprise. This technical means requires the preparation of a mask to resist the diffusion of secondary phosphorus sources in local areas, so the mask The quality affects whether the selective emitter principle can be realized. In the prior art equipment for making masks for crystalline silicon solar cells, oxygen is directly fed into the reaction chamber, and the temperature of the oxyg...

Claims

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Application Information

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IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 史孟杰黄仑吴俊清王金伟全余生
Owner DONGFANG HUANSHENG PHOTOVOLTAIC (JIANGSU) CO LTD
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