Method and device for ultraviolet optic online automatic detection of indium tin oxide (ITO) membrane circuit pattern defect information

Abstract

The invention discloses a method and a device for ultraviolet optic online automatic detection of indium tin oxide (ITO) membrane circuit pattern defect information. The device comprises an ultraviolet optic device, a micro visual imaging device, an image collecting synchronous control device, an image processing device and a result output device. The bright-dark field illumination can be formed on an ITO membrane through the ultraviolet optic device at the same time, gray contract and enhancement circuit pattern defect information of ITO circuit patterns and polyethylene terephthalate (PET) base material backgrounds in the image space are highlighted, synchronous signals are established by a coder, the image collecting synchronous control device modulates the synchronous signals, the precise synchronization of image acquisition triggering signals and membrane running speeds is controlled, the micro visual imaging device is used for conducting high-resolution amplification for the defect information, the image collecting synchronous control device is used for transmitting the defect information to a processer, the image processing device is used for analyzing and processing the defect information, and the result output device is used for counting, classifying, alarming, storing and displaying the detected defect information.

Description

technical field [0001] The invention specifically relates to an ultraviolet optical on-line automatic detection method and device for defect information of an ITO thin film circuit pattern. Background technique [0002] Indium Oxide doped with Tin Film (ITO) has excellent physical properties such as low resistivity and high visible light transmittance. Its film layer is resistant to high temperature, humidity and excellent stability. It is ideal for manufacturing various optical devices, Important materials for optoelectronic devices and optoelectronic instruments are widely used in products such as liquid crystal displays, touch screens, solar panels, and automotive anti-fog glass. In recent years, with the rapid development of LCD TV, PDA, LCD, notebook computer and other markets, the demand for ITO materials has been greatly increased. [0003] The surface of the ITO thin film often needs to be processed with fine pattern electrodes. Since pattern defects directly affec...

AI Technical Summary

Problems solved by technology

However, although the inspection technology based on machine vision has been increasingly applied in industries such as printed matter, glass products, and plastic film, due to the transparent material characteristics of the ITO film, the grayscale between its surface pattern and the PET substrate The contrast is extremely low, which creates a huge obstacle for the application of visual inspection technology

Therefore, for a long time, the detection of circuit pattern defects on the surface of ITO films has to be done offline by manual tools such as microscopes, which not only has high labor intensity, low efficiency, high missed detection rate, and the detection results are easily affected by the subjective factors of inspectors. and other disadvantages, and long-term high-intensity work is very harmful to human health

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