Illumination stability amorphous metallic oxide thin film transistor (TFT) device and display device
An amorphous and oxide technology, applied in semiconductor/solid-state device components, semiconductor/solid-state device manufacturing, semiconductor devices, etc., to reduce surface damage and improve long-term stability
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[0041] The features and technical effects of the technical solution of the present invention will be described in detail below with reference to the accompanying drawings and in combination with schematic embodiments, and a high-stability amorphous metal oxide transistor device structure and its preparation method are disclosed. It should be pointed out that similar reference numerals represent similar structures, and the terms "first", "second", "upper", "lower" and the like used in this application can be used to modify various device structures. These modifications do not imply a spatial, sequential or hierarchical relationship of the modified device structures unless specifically stated.
[0042] Such as figure 1 Shown is a schematic cross-sectional view of an amorphous oxide TFT with a top gate protection electrode according to the present invention, including a substrate 10, a buffer layer 11 on the substrate 10, an inverted gate electrode 20 on the buffer layer 11, and ...
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