Optical component surface cleaning method based on ion beam polishing

Abstract

The invention discloses an optical component surface cleaning method based on ion beam polishing. The method comprising the following steps of: machining the surface of a machining object by adopting an ion beam polishing method based on a low-energy ion sputtering principle by taking an optical component subjected to single-point diamond turning or magnetorheological polishing as the machining object; during the machining process, controlling ion beams to uniformly sweep the surface of the optical component; and after the machining is concluded, cleaning the surface of the optical component. The optical component surface cleaning method disclosed by the invention is simple and practicable, low in requirements on equipment, and capable of reducing the surface roughness of the optical surface component and removing the surface impurities of the optical component.

Description

technical field

[0001] The invention relates to the technical field of ultra-precision processing of optical elements, in particular to a method for cleaning the surface of optical elements based on low-energy ion sputtering. Background technique

[0002] KDP (KH 2 PO 4 ) crystal is a very good nonlinear optical crystal material, which has the characteristics of large nonlinear optical coefficient, wide light transmission band, excellent optical uniformity and high laser damage threshold, etc., and has been widely used It is used in high-tech fields such as laser frequency doubling devices, parametric oscillation, electro-optic modulation, piezoelectric transducers and fast optical switches. Especially in the field of inertial confinement laser nuclear fusion, KDP crystal is the best laser wavelength conversion optical element to improve the efficiency of nuclear fusion reaction.

[0003] The inertial confinement fusion ICF laser device requires KDP crystal optical elemen...

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