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VC/Co toughening coating layer with nanometer multilayer structure and preparation method thereof

A nano-multi-layer and toughening technology, applied in coatings, nanotechnology, nanotechnology, etc., can solve the problems of VC/Co coatings with no nano-multilayer structure and toughened coatings with no toughening effect , to achieve the effect of great application value, easy implementation and strong operability

Active Publication Date: 2013-04-17
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Through further search and analysis of the literature, no VC / Co coating with a nano-multilayer structure has been found, nor a toughened coating with a VC / Co nano-multilayer structure with excellent toughening effect and hardness exceeding 15GPa

Method used

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  • VC/Co toughening coating layer with nanometer multilayer structure and preparation method thereof
  • VC/Co toughening coating layer with nanometer multilayer structure and preparation method thereof
  • VC/Co toughening coating layer with nanometer multilayer structure and preparation method thereof

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preparation example Construction

[0030] The preparation method of coating in comparative example and embodiment 1~11:

[0031] Firstly, clean the substrate 3 (i.e., the silicon wafer). Put the substrate 3 into the detergent of model HT1401 produced by Borer Company and ultrasonically clean it for 3 minutes at a temperature of 60°C, and then put it into the detergent of model HT1233 produced by Borer Company. Ultrasonic cleaning in detergent at 50°C for 3 minutes, then ultrasonic cleaning in 45°C deionized water for 0.5 minutes, and finally put the cleaned substrate 3 into a vacuum oven at 95°C and bake for 3 minutes. After drying, place on a rotating table in a vacuum chamber.

[0032] Install the VC target 5 and the Co target 6 on the intermediate frequency cathode respectively, evacuate the vacuum chamber, and heat the substrate to the required deposition temperature, when the background pressure of the vacuum chamber (background vacuum) reaches the required pressure When the Ar gas is introduced, the pressu...

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Abstract

The invention discloses a VC / Co toughening coating layer with a nanometer multilayer structure. The coating layer is formed by alternatively depositing VC layers and Co layers; adjacent one VC layer and one Co layer form one double-layer periodic layer; each double-layer periodical layer is 1-88 nm in thickness; the thickness ratio of the VC layer to the Co layer in each double-layer periodic layer is (1.0-3.0):1; and the total thickness of the double-layer periodic layer is 1-5 microns. The invention further discloses a preparation method for the VC / Co toughening coating layer with the nanometer multilayer structure; the method comprises the steps of respectively mounting VC targets and Co targets on medium-frequency cathodes, placing target surfaces perpendicular to a rotary working table, and adopting the magnetron sputtering method to deposit matrixes. At the same time of keeping higher hardness, the VC / Co toughening coating layer with the nanometer multilayer structure improves the toughness, so that the hardness and toughness requirements of protection coating layers and wear-resistant coating layers can be satisfied; and the preparation method has the advantages of strong operability, good controllability and easiness in industrial production.

Description

technical field [0001] The invention relates to a hard coating and a preparation method thereof, in particular to a VC / Co toughened coating with a nano-multilayer structure and a preparation method thereof, belonging to the field of ceramic coatings. Background technique [0002] Hard protective coatings are mainly formed of transition metal nitrides, carbides, borides composed of metal bonds, and metal oxides composed of ionic bonds. These coatings have high hardness, but their toughness is very low. , improving the toughness of these coatings is as important as increasing their hardness, especially in friction and wear applications. [0003] Transition metals Ti, V, W, Ta, Zr, Mo, Cr, etc. can react with carbon atoms to form metal carbide coatings. Metal carbide coatings have the characteristics of good chemical stability, high melting point and high hardness, but , The carbide coating has poor toughness and is brittle. Many studies have shown that the structure of metal...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B9/04B32B15/04C23C14/14C23C14/06C23C14/34B82Y40/00B82Y30/00
Inventor 黄峰张晓娟李艳玲
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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