Quartz tube used in tablet PECVD equipment and installation method thereof
A technology for quartz tubes and quartz glass tubes, applied in the direction of gaseous chemical plating, metal material coating technology, coatings, etc., can solve the problems of cavity air leakage, pressure reduction, and sealing rings that are easy to burn and deform, and achieve Uniform heat expansion, easy disassembly, and easy handling
Inactive Publication Date: 2013-05-01
JETION SOLAR HLDG
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Problems solved by technology
[0003] However, in flat PECVD, the quartz tube of the microwave source is exposed to a high temperature of 400°C and a high-power discharge environment for a long time. Air leakage, resulting in color difference film, thus affecting the efficiency and pass rate of the cell
Therefore, in order to solve the problem of air leakage, the cavity must be opened and the quartz tube replaced. However, to replace the quartz tube, it needs to be lowered from 400°C to room temperature; and under high temperature operation, silicon nitride Si will be deposited on the surface of the quartz tube. 3 N 4 , Si 3 N 4 The high hardness makes the quartz tube easy to crack when replacing, so it will be broken to facilitate disassembly, but it is easy to produce Si 3 N 4 Waste slag and quartz debris will block the special pores and increase the difficulty of cleaning
Method used
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Embodiment Construction
[0009] The embodiment of the present invention provides a quartz tube applied to flat PECVD equipment and its installation method, please refer to figure 1 , is a flow diagram of the installation method, the steps of which include:
[0010] S101, wrapping a layer of high temperature resistant adhesive tape outside the quartz glass tube;
[0011] It should be noted that the high temperature resistant tape includes high polyimide film or other high temperature resistant tape, mainly to make the quartz tube heat expansion uniform; its winding method can be spiral winding or other winding methods, such as figure 2 shown;
[0012] S102, setting the copper inner guide shaft in the cavity of the quartz glass tube;
[0013] S103. Assemble parts in sequence at both ends of the quartz glass tube; the parts include a bayonet locking mechanism, an aluminum annular thrust shaft, a polytetrafluoroethylene ring, a first polychloroprene rubber sealing ring, polytetrafluoroethylene Fluoroe...
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Embodiments in the invention disclose an installation method for a quartz tube used in tablet PECVD equipment. The installation method comprises the following steps: winding a layer of high temperature-resistant adhesive tape out of the quartz glass tube; arranging a copper inner guide shaft in the cavity of the quartz glass tube; respectively assembling parts at two ends of the quartz glass tube in sequence; symmetrically arranging the parts at two ends of the quartz glass tube; arranging the copper inner guide shaft to pass through central small holes in polytetrafluoroethylene trays at two ends of the quartz glass tube; scrubbing the quartz glass tube with alcohol; and respectively pushing two ends of the quartz glass tube with the assembled parts into aluminum caps matching with the assembled parts at two ends of the quartz glass tube. With the method, thermal expansion of the quartz tube in work is homogenized, and dismounting of the quartz tube is more convenient. The embodiments in the invention further provide the quartz tube used in tablet PECVD equipment.
Description
technical field [0001] The invention belongs to the technical field of solar cell production, and in particular relates to a quartz tube applied to PECVD equipment and an installation method thereof. Background technique [0002] Flat-panel plasma enhanced chemical vapor deposition (PEVCD, Plasma Enhanced Chemical Vapor Deposition) is one of the main methods of PEVCD process for silicon solar cells. In the process of flat-panel PECVD, a coaxial quartz tube system is used to excite the plasma. After a built-in coaxial quartz tube is connected with the microwave transmitter, the surface wave discharge can be performed on the quartz tube, so that a highly uniform microwave plasma can be excited, or a large-area linear microwave plasma. The coaxial quartz The tube is also called microwave source quartz tube. [0003] However, in flat PECVD, the quartz tube of the microwave source is exposed to a high temperature of 400°C and a high-power discharge environment for a long time. ...
Claims
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Inventor 王竞争
Owner JETION SOLAR HLDG