Sealing water tank of phosphorus diffusion furnace exhaust tube

A technology for sealing water tanks and exhaust pipes, applied in the directions of diffusion/doping, crystal growth, electrical components, etc., can solve the problems of phosphorus oxychloride leakage, operator harm, etc., to reduce the corrosion rate, avoid poisoning accidents, increase The effect of running load

Inactive Publication Date: 2013-05-15
陈功
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These ventilation devices are generally made of stainless steel or iron sheets, but phosphorus oxychloride is very corrosive, and usually these ventilation p

Method used

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  • Sealing water tank of phosphorus diffusion furnace exhaust tube
  • Sealing water tank of phosphorus diffusion furnace exhaust tube
  • Sealing water tank of phosphorus diffusion furnace exhaust tube

Examples

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[0026] Such as figure 2 Shown is the overall structure of the phosphorus oxychloride removal device of the phosphorus diffusion furnace applying the sealed water tank of the present invention, which includes a buffer tank 2, a suction pipe 3 and a sealed water tank 4, and also includes a Figure 7 The cooling tank 5 shown.

[0027] Such as image 3 with Figure 4 As shown, the furnace cap 1 of the phosphorous diffusion furnace tube includes a cylindrical quartz material cap body 10 with a closed bottom. The bottom of the cap body 10 is provided with an opening extension nozzle 12 protruding outwards. The bottom of the cap body A quartz snap ring 13 is welded on the inner wall, and the opening extension nozzle is arranged between the bottom surface of the snap ring and the bottom wall of the cap body. A quartz handle 11 is welded to the outer wall of the bottom of the cap body. The length of the opening extension nozzle 12 is controlled to be 3-5 cm, and the inner diameter of th...

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Abstract

The invention discloses a sealing water tank of a phosphorus diffusion furnace exhaust tube. The sealing water tank comprises a square sealing tank body of which the upper part is open; the opening part above the sealing tank body is of an open structure which is opened towards the outer side; a circle of sealing rings are arranged at the inner wall of the open structure; a fixed buckle is arranged at the outer side of the upper edge of the upper opening; a water inlet is arranged at the bottom side of the sealing tank body; and an overflow outfall is arranged above the water inlet at the side of the sealing tank body opposite to the water inlet. The bottom part of the exhaust tube is provided with an opening and is connected with the sealing water tank, so that phosphorus oxychloride liquid which is rapidly liquefied inside the exhaust tube falls into the sealing water tank; neutralized innocent treatment is carried out inside the sealing water tank; finally, phosphorus oxychloride liquid is discharged from the overflow outfall of the sealing water tank, and enters a waste water treatment system. Thus, the corrosion speed of a ventilation system is reduced; and the leakage of gasified phosphorus oxychloride and poisoning accidents are also avoided.

Description

technical field [0001] The invention relates to the field of manufacturing semiconductor discrete devices and solar cells. Background technique [0002] Phosphorus diffusion is a necessary process for manufacturing PN junctions of semiconductor discrete devices, integrated circuit chips and solar cells. At present, the technology used in this process is thermal diffusion technology. Semiconductor discrete devices are mainly used to manufacture diodes, triodes, power devices, IGBTs and thyristors, etc. This series of products has sales of tens of billions in China, and the production capacity is very large. On the other hand, as the use of solar cells, silicon wafers are also widely used. More than 70% of solar cells in the world use silicon wafers as cells. In 2011, the production capacity of 25GW has been achieved, and the polycrystalline consumption has reached 180,000 tons, which is six times the semiconductor consumption, so the output of solar energy is greater than th...

Claims

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Application Information

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IPC IPC(8): C30B31/16H01L21/223
Inventor 陈功
Owner 陈功
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