Quantum well terahertz detector
A terahertz detector and quantum well technology, applied in the field of terahertz detectors, can solve the problems of inability to contribute to the photocurrent of the external circuit of the detector, inability to respond to THz radiation, etc., and achieve the suppression of dark current and phonon scattering probability, The effect of reducing dark current and improving detection rate
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[0021] See figure 1 with figure 2 , a quantum well terahertz detector in this embodiment includes a multi-quantum well semiconductor chip 13 and a superconducting magnet system.
[0022] See figure 1 , the multi-quantum well chip 13 of this embodiment utilizes typical semiconductor material epitaxial growth technology, such as molecular beam epitaxy technology, metal-organic chemical vapor deposition technology, etc., and the preparation process is mature. Sequential growth on a semi-insulating GaAs substrate 1:
[0023] Si-doped GaAs lower electrode layer 2 with a thickness of 800 nm;
[0024] Alternately growing 30 or 50 cycles of multiple quantum well layers 3 composed of AlGaAs barrier layers and GaAs potential well layers;
[0025] 20nm thick AlGaAs barrier layer 4;
[0026] Si-doped GaAs upper electrode layer 5 with a thickness of 400 nm.
[0027] The height of the AlxGa1-xAs barrier layer in the multi-quantum well layer 3 is adjusted by the Al composition x, and ...
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