Carbon-titanium composite coating and preparation method of coating

A composite coating, carbon-titanium technology, applied in the field of wear-resistant coatings, can solve the problems of unsatisfactory hardness and friction and wear performance, and achieve the effects of facilitating continuous industrial production, high bonding strength, and improving service life

Active Publication Date: 2013-06-12
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this technical solution improves the interfacial bonding force between the amorphous carbon coating and the substrate through a composite film layer with a composition gradient, and keeps it good in hardness and friction performance, it can be seen from Table 4 of Example 2 that the hardness is the highest It is 15.3GPa, the friction factor is 0.1~0.21, and the wear rate is 1.23~8.88×10 -8 , its hardness and friction and wear properties are not ideal, and need to be further improved

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0040] The carbon-titanium composite coating of the present invention is prepared by closed-field unbalanced magnetron sputtering, and the device for realizing the preparation method of the carbon-titanium composite coating of the present invention in the specific embodiment is adopted, and the preparation steps are as follows:

[0041] 1) Select the medical Ti6Al4V alloy as the matrix, place the matrix on the sample holder 12 on the sample stage 11, the graphite target 7 and the graphite target 9 work, the titanium target 8 works, and the titanium target 10 does not work, adjust the relationship between each target and the matrix The spacing is adjusted to 10cm, and the revolution speed of the control sample stage 11 is 3rpm;

[0042] Pre-evacuate the chamber to 4.5 x 10 -3 Pa, followed by pure argon gas, the flow rate of argon gas was controlled at 25 sccm, and the pre-sputtering was performed for 20 min at a bias voltage of -500V and a titanium target current of 0.2A and a ...

Embodiment 2

[0049] The carbon-titanium composite coating of the present invention is prepared by closed-field unbalanced magnetron sputtering, and the device for realizing the preparation method of the carbon-titanium composite coating of the present invention in the specific embodiment is adopted, and the preparation steps are as follows:

[0050] 1) Select the medical Ti6Al4V alloy as the matrix, place the matrix on the sample holder 12 on the sample stage 11, the graphite target 7 and the graphite target 9 work, the titanium target 8 works, and the titanium target 10 does not work, adjust the relationship between each target and the matrix The spacing is adjusted by 10cm, and the revolution speed of the control sample stage 11 is 3rpm;

[0051] Pre-evacuate the chamber to 4.5 x 10 -3 Pa, followed by pure argon gas, the flow rate of argon gas was controlled at 25 sccm, and the pre-sputtering was performed for 20 min at a bias voltage of -500V and a titanium target current of 0.2A and a ...

Embodiment 3

[0058] The carbon-titanium composite coating of the present invention is prepared by closed-field unbalanced magnetron sputtering, and the device for realizing the preparation method of the carbon-titanium composite coating of the present invention in the specific embodiment is adopted, and the preparation steps are as follows:

[0059] 1) Select the medical Ti6Al4V alloy as the matrix, place the matrix on the sample holder 12 on the sample stage 11, the graphite target 7 and the graphite target 9 work, the titanium target 8 works, and the titanium target 10 does not work, adjust the relationship between each target and the matrix The spacing is adjusted by 10cm, and the revolution speed of the control sample stage 11 is 3rpm;

[0060] Pre-evacuate the chamber to 4.5 x 10 -3 Pa, followed by pure argon gas, the flow rate of argon gas was controlled at 25 sccm, and the pre-sputtering was performed for 20 min at a bias voltage of -500V and a titanium target current of 0.2A and a ...

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Abstract

The invention discloses a carbon-titanium composite coating consisting of a pure titanium bottom layer, a carbon-titanium transition layer and a nano-multilayer composite top layer, wherein the pure titanium bottom layer, the carbon-titanium transition layer and the nano-multilayer composite top layer are deposited on a matrix in sequence; the nano-multilayer composite top layer is formed by alternately depositing carbon-titanium composite nanolayers and carbon nanolayers; the carbon-titanium composite nanolayers are contacted with the carbon-titanium transition layer and consist of TiC grains and amorphous carbon; and the carbon nanolayers consist of amorphous carbon. The carbon-titanium composite coating has the advantages of high hardness, low stress, large thickness, low friction coefficient and excellent abrasive resistance, and can be applied to surfaces of bearings, gyroscopes, gears and metal cutting tools as well as biomedicines such as surfaces of artificial hip joints, so that the service lives of the materials are greatly prolonged. The invention further discloses a preparation method of the carbon-titanium composite coating; and through a closed field unbalanced magnetron sputtering method, the carbon-titanium composite coating is well combined with the matrix, and continuous industrial production is facilitated.

Description

technical field [0001] The invention relates to the field of wear-resistant coatings, in particular to a carbon-titanium composite coating and a preparation method thereof. Background technique [0002] Amorphous carbon coating has high hardness, good chemical stability, low friction coefficient and high wear resistance, so it is widely used in bearings, gyroscopes, gears and metal cutting tools to improve the mechanical properties and Anti-wear, prolonging its service life. However, due to the high internal stress (usually up to 10GPa) in the amorphous carbon coating, the bonding strength between the amorphous carbon coating and the substrate is reduced, and the thickness of the amorphous carbon coating is also limited. It is easy to peel off, which largely limits the tribological application of amorphous carbon coatings under high loads. [0003] In order to reduce the internal stress in the amorphous carbon coating, on the one hand, the amorphous carbon coating can be p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34
Inventor 王秀丽蔡建宾谷长栋涂江平
Owner ZHEJIANG UNIV
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