Organic film forming device and organic film forming method

A technology for organic film and film-forming objects, which is applied in lighting devices, optomechanical equipment, and components used in photomechanical processing. It can solve the problems of re-evaporation of organic materials and difficulty in film formation, and achieve the effect of preventing re-evaporation

Active Publication Date: 2016-01-06
ULVAC INC
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  • Abstract
  • Description
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Problems solved by technology

[0005] However, when the film-forming object is moved while depositing and solidifying the organic material, there is a problem that the temperature of the film-forming object fluctuates during the movement, and the deposited organic material re-evaporates.
In addition, it is difficult to form a patterned film using a mask in order to move the object to be filmed.

Method used

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  • Organic film forming device and organic film forming method
  • Organic film forming device and organic film forming method
  • Organic film forming device and organic film forming method

Examples

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Embodiment Construction

[0025] refer to figure 1 , reference numeral 10 is the organic film forming apparatus of the present invention, and reference numeral 5 denotes a film-forming object on which an organic film is formed on the surface by the organic film forming apparatus 10 .

[0026] This organic film forming apparatus 10 has: a vacuum chamber 11 to which a vacuum pump 12 is connected, a substrate stage 14 on which a film-forming object 5 is arranged, and a photoreactive material in either or both of a gaseous state and a droplet state. The carrier gas is supplied to the raw material supply device 18 of the shower plate 15 .

[0027] The inside of the shower plate 15 is hollow, and the photoreactive material supplied together with the carrier gas from the material supply device 18 is introduced into the hollow portion. The shower plate 15 is provided with a plurality of ejection ports 16 connected to the hollow portion on one surface thereof, and the photoreactive material is ejected from the...

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Abstract

The present invention provides an organic film forming device and an organic film forming method capable of forming an organic film by making an object to be film-formed stand still after attaching an organic material to solidify the organic material. Place the film-forming object (5) on the substrate table (14) arranged in the vacuum chamber (11), place the mask (31) in contact with the surface of the film-forming object (5), and cool the film-forming object (5) , while vacuuming the inside of the vacuum chamber (11), eject the photoreactive material that cures when irradiated with light from the mask (31), and make it adhere to the opening of the mask (31) ( 34) On the surface of the film-forming object (5) exposed at the bottom, a liquid film of photoreactive material is formed on the attached part, and in the state where the vacuum exhaust in the vacuum chamber (11) is stopped, the light emitting light The irradiation device ( 24 ) moves on the mask while emitting light, solidifies the liquid film, and forms an organic film of a photoreactive material.

Description

technical field [0001] The present invention relates to an organic film forming device and an organic film forming method, and particularly relates to the technical field of forming an organic film by solidifying an organic material after adhering to an object to be filmed. Background technique [0002] Conventionally, in the manufacturing process of an organic EL element, after forming a lower electrode layer, an organic light emitting layer, and an upper electrode layer sequentially on a substrate, a sealing layer is formed as a protective film in order to protect the surface and prevent the intrusion of moisture. [0003] In Patent Document 1, it is proposed that the sealing layer of the organic EL element is formed as a laminated film in which at least a barrier layer, an organic layer, and a barrier layer are sequentially formed. [0004] In addition, in Patent Document 2, it is proposed to have a treatment chamber for depositing an organic material of an organic film, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/12C23C14/58H01L51/50H05B33/10
CPCG03F1/50G03F7/2014H05B33/10H10K71/164H10K71/166H10K71/40H10K71/421H10K71/00
Inventor 内田一也大森大辅宫内淳
Owner ULVAC INC
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