A Piezoelectric Micromixer

Abstract

The invention relates to the micromechanical field of microfluid pumping and mixing, in particular to a piezoelectric valveless micromixer. It includes two inlet passages, an inlet buffer chamber, an inlet vortex tube, a pump chamber, a piezoelectric vibrator, an upper substrate, a pump body, an outlet vortex tube, an outlet buffer chamber and an outlet channel. In the structure of the present invention, the two inlet passages meet at the inlet buffer chamber, and the angle between the center lines is less than or equal to 90 degrees. The vortex tube is made by adding triangles in the diffusion tube. The main advantage of the present invention is that: in the present invention, the fluid to be mixed is firstly mixed in the inlet buffer chamber by the intersection of two inlet passages, and then further effectively mixed in a specially designed vortex tube, greatly shortening the The time required for mixing is reduced, and the mixing efficiency is improved.

Description

technical field [0001] The invention relates to the micromechanical field of microfluid pumping and mixing, in particular to a piezoelectric valveless micromixer. Background technique [0002] Microfluidic chip is an important branch of MEMS research, which can realize the separation, addition, mixing, reaction, detection and other functions of traditional biochemical detection process on the chip. Microfluidic chip can realize fluid flow from nanoliter to microliter The control and drive of the microfluidic chip can realize the precise control of the flow of a small amount of liquid, and has been widely used in many fields such as chemical analysis, disease diagnosis, drug screening, etc.; and the micromixer is one of the important functional devices in the microfluidic chip. The ratio of the surface area to the volume of the fluid in the microchannel is quite large, the flow velocity and Reynolds number of the liquid are low, and it is often in a state of laminar flow, whi...

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Problems solved by technology

There are also channel structures such as C-type, Z-type, curved arc pipe, L-type, T-type, modified tesla structure, twisted pipe and other channel structures by bending the channel in a spatial range. The active micro-mixer is divided according to the principle of action. It can be divided into electrodynamic type, magnetic dynamic type, ultrasonic type, branch injection type, piezoelectric type, magnetic induction type, jet type, mechanical type, etc.; for example, the vibration source of the ultrasonic brake micro-mixer studied by Yang et al. Electroceramics (PZT), Frédéric Bottausci's group developed a spider micro-mixer, etc. Passive micro-mixers do not require external energy input, the mixing effect is stable, and they are easy to integrate in microfluidic systems, but the channels are often very long or large in volume , it is necessary to process complex three-dimensional structures, and for flows with particularly low Reynolds numbers, the mixing effect is not good and the controllability is poor

The existing active mixer has shorter mixing time and better controllability than the passive mixer, but requires external excitation or disturbance, and the reliability needs to be improved. And passive elements of the piezoelectric valveless micro-mixer to improve the mixing effect and greatly shorten the mixing time

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