Method and devices for preparing microscopic samples with the aid of pulsed light

An electron microscope and sample technology, applied in the field of microscope samples, can solve the problems of not always successful, slow preparation, etc.

Active Publication Date: 2013-08-21
CARL ZEISS MICROSCOPY GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] Although sample preparation using electron beams and / or ion beams and / or activated process gases can be achieved with high precision, such systems have the disadvantage that the preparation is slow and not always successful
Such a process would take a relatively large amount of time in the case of large sample volumes to be removed

Method used

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  • Method and devices for preparing microscopic samples with the aid of pulsed light
  • Method and devices for preparing microscopic samples with the aid of pulsed light
  • Method and devices for preparing microscopic samples with the aid of pulsed light

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Embodiment Construction

[0068] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Components that are structurally and functionally similar to each other are identified by reference numerals having the same numerals but differentiated by adding different letters. For the description of these components, reference is also made to the preceding and following corresponding parts of the description, respectively.

[0069] figure 1 A flowchart representing the method according to the invention. The object from which the sample is to be prepared is placed in the processing chamber of the processing system according to the invention. In step 201 the object is checked. Inspection may be performed using an electron microscope or a focused ion beam, or a combination of electron microscope and focused ion beam. In any event, an image is recorded, which can be stored into memory for possible later use. In step 202 , the part of the object to be s...

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Abstract

Methods and apparatus are disclosed for the preparation of microscopic samples using light pulses. Material volumes greater than 100 mum3 are removed. The methods include inspecting an object with a scanning electron microscope (SEM) or a focused ion beam (FIB). The inspection includes recording an image of the object. The methods also includes delineating within the object a region to be investigated, and delineating a laser-machining path based on the image of the object so that a sample can be prepared out of the object. The methods further include using laser-machining along the delineated laser-machining path to remove a volume that is to be ablated, and inspecting the object with the scanning electron microscope (SEM) or a focused ion beam (FIB).

Description

technical field [0001] The present invention relates to a method and a device for preparing different kinds of microscopic samples by using pulsed light. Background technique [0002] The application of current microscopy methods (such as transmission electron microscopy, nanotomography, or the study of micromechanical aspects of materials) often requires the preparation of three-dimensional samples with complex geometries. This may involve removing 1 cubic micron (µm 3 ) to tens of cubic millimeters (mm 3 ) material volume. Since in most cases only a specific part of the object needs to be sampled, an arbitrary region of the object cannot be arbitrarily selected for sample preparation. Rather, it is necessary to prepare a defined target structure from the object in order to obtain the desired sample. [0003] In the practice of transmission electron microscopy, so-called TEM lamellae that are transparent to electrons are required. The length and width of the TEM flakes...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/28G01N1/44
CPCG01N1/286G01N1/32G01N23/04G01N2001/045G01N2001/2886H01J37/317H01J2237/206H01J2237/31745H01J2237/31749H01J37/00
Inventor H·斯特格曼
Owner CARL ZEISS MICROSCOPY GMBH
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