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SPR sensor cell and SPR sensor

A sensor unit and cladding technology, which is applied in the field of SPR sensor unit and SPR sensor, can solve the problems such as the difficulty of fixing samples for metal thin film analysis, and achieve the effect of improving detection sensitivity

Inactive Publication Date: 2013-08-21
NITTO DENKO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, in such an SPR sensor equipped with an optical fiber, the front end of the optical fiber is in a fine cylindrical shape, so there are inconveniences such as the formation of a metal thin film and the difficulty in fixing the analysis sample.

Method used

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  • SPR sensor cell and SPR sensor
  • SPR sensor cell and SPR sensor
  • SPR sensor cell and SPR sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0146] A roughly prism-shaped core layer with a thickness of 50 μm and a width of 50 μm is formed on a silicon substrate (substrate) using a photosensitive epoxy resin (see image 3 (a)).

[0147] Next, using a photosensitive epoxy resin having a lower refractive index than the photosensitive epoxy resin used to form the core layer, an under clad layer is formed on the silicon substrate so as to cover the core layer so that the area from the upper surface of the core layer 100µm thick (refer to image 3 (b)).

[0148] Next, the silicon substrate is peeled off from the lower cladding and core layers (see image 3 (c)), so that the lower cladding layer and the core layer are turned upside down.

[0149] Next, a silicon dioxide film with a thickness of 10 nm was formed as a protective layer on the lower cladding layer and the core layer by sputtering (refer to image 3 (d)).

[0150] Next, a gold thin film with a thickness of 50 nm and a width of 1 mm is formed on the protec...

Embodiment 2

[0155] An SPR sensor cell was obtained in the same manner as in Example 1 except that an aluminum oxide thin film having a thickness of 10 nm and a width of 1 mm was formed as the cover layer instead of the silicon dioxide thin film. The contact angle of the covering layer to water was measured by the static drop method based on JIS R3257 and found to be 78.2°.

Embodiment 3

[0157] A roughly prism-shaped core layer with a thickness of 50 μm and a width of 50 μm is formed on a silicon substrate (substrate) using a photosensitive epoxy resin (see Figure 5 (a)).

[0158] Next, using a photosensitive epoxy resin having a lower refractive index than the photosensitive epoxy resin used to form the core layer, an under clad layer is formed on the silicon substrate so as to cover the core layer so that the area from the upper surface of the core layer 100µm thick (refer to Figure 5 (b)).

[0159] Next, the silicon substrate is peeled off from the lower cladding and core layers (see Figure 5 (c)), so that the lower cladding layer and the core layer are turned upside down.

[0160] Next, a silicon dioxide film with a thickness of 10 nm was formed as a protective layer on the lower cladding layer and the core layer by sputtering (refer to Figure 5 (d)).

[0161] Next, a 3% by mass ethanol solution of γ-aminopropyltriethoxysilane (silane coupling age...

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Abstract

Disclosed is an SPR sensor which is provided with an SPR sensor cell. The SPR sensor cell is provided with an optical waveguide that comes into contact with a sample. The optical waveguide is provided with: an under-cladding layer; a core layer that is formed in the under-cladding layer so that at least a part of the core layer is exposed from the under-cladding layer; a metal layer that covers the part of the core layer exposed from the under-cladding layer; and a cover layer that covers the metal layer and comes into contact with the sample. The wettability of the cover layer with respect to water is higher than the wettability of the metal layer with respect to water.

Description

technical field [0001] The present invention relates to an SPR sensor unit and an SPR sensor. Specifically, it relates to an SPR sensor unit including an optical waveguide and an SPR sensor including the SPR sensor unit. Background technique [0002] Conventionally, SPR (Surface Plasmon Resonance: Surface Plasmon Resonance) sensors equipped with optical fibers have been used in the fields of chemical analysis, biochemical analysis, and the like. [0003] In an SPR sensor including an optical fiber, a metal thin film is formed on the outer peripheral surface of the front portion of the optical fiber, and an analysis sample is fixed and light is introduced into the optical fiber. Furthermore, light of a specific wavelength among the introduced light causes surface plasmon resonance in the metal thin film, and its light intensity attenuates. [0004] In such SPR sensors, the wavelength at which surface plasmon resonance occurs generally varies depending on the refractive index...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/27G01N21/03
CPCG01N21/03G01N21/553G01N21/7703G01N2021/7776G01N2021/0346G02B6/036
Inventor 绀谷友广
Owner NITTO DENKO CORP