Surface plasmon polariton waveguide with metal-insulator-semiconductor (MIS) capacitor structure

Abstract

The invention discloses a surface plasmon polariton (SPP) waveguide with a metal-insulator-semiconductor (MIS) capacitor structure. The SPP waveguide consists of a metal layer (1), an insulating material layer (2), a doped semiconductor layer (3) and a substrate (4), which are arranged from top to bottom, wherein the substrate is grounded through a wire; the metal layer is connected with external voltage through a wire; under proper voltage, a negative real part epsilon r of a complex dielectric function is changed to be positive from an interface of the doped semiconductor layer (3) and the insulating material layer (2) to the interior of the doped semiconductor layer (3), and an area where the epsilon r is negative has characteristics similar to those of metal; an SPP mode can be supported on the interface of the doped semiconductor layer (3) and the insulating material layer (2) and an interface of the positive epsilon r and the negative epsilon r; and the SPP mode supported on the interface of the positive epsilon r and the negative epsilon r is coupled with an SPP mode supported by an interface of the metal layer (1) and the insulating material layer (2) to form a hybrid SPP mode. According to the SPP waveguide, the controllability of a semiconductor can be used for conveniently and efficiently realizing SPP wave regulation and solving a conflict between light field limit and loss.

Description

technical field

[0001] The invention relates to a Surface Plasmon Polariton (SPP) waveguide structure and device with a metal-insulator-semiconductor (Mental-Insulator-Semiconductor, MIS) capacitance structure, wherein the semiconductor layer and the insulating material are utilized under the action of an applied voltage The change of the complex dielectric function and its distribution of semiconductor materials near the layer interface can realize the switch of SPP wave transmission and the control of SPP field strength, and has potential applications in photonic integration, nonlinear optics and other fields. Background technique

[0002] The SPP wave is an electromagnetic wave guided at the interface between a conductor and a medium, which originates from the collective oscillation of free charges near the surface of the conductor caused by the excitation of an external electromagnetic field. The local enhancement effect brought by the unique generation mechanism of SPP ...

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