Grinding method of diamond surface
A grinding method and diamond technology, applied in machine tools, grinders, abrasives and other directions suitable for grinding workpiece planes, can solve problems such as uncomfortable grinding and short tool life.
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[0091] The present invention will now be described through the following experimental examples.
[0092] In the experimental example, the surface roughness was measured by the following method.
[0093] Surface roughness:
[0094] The maximum height Rz was measured according to JIS-B-0601 by using a surface roughness meter (Surfcom575A) manufactured by Tokyo Seimitsusha Co..
experiment example 1
[0096] use figure 1 The structure of a polishing tester and a test piece to be polished obtained by coating a substrate of a cemented carbide with diamond by the hot filament CVD method are schematically shown.
[0097] Test piece:
[0098] Shape: 13mm×13mm (5mm thick) flat plate
[0099] Base material: super hard alloy
[0100] Diamond thickness: 10μm
[0101] Maximum height Rz: 1.5μm (diamond surface)
[0102] Laser (CO2 gas laser), Evolution100W,
[0103] Manufactured by SynradCo.:
[0104] Output: 100W
[0105] Illumination width (spot diameter):
[0106] Mount the Ta wiring with a circular cross section and a diameter of 1 mm as a polishing member to the above-mentioned polishing tester (see image 3 (a)), and the gap between the laser irradiation position and the contact position of the polishing member and the test piece is set to 2 mm. In this state, the polishing member (Ta wiring) was pushed onto the surface of the test piece with a load of 10N, and the test piece was polished b...
experiment example 2
[0110] Except that the laser beam was not irradiated, the polishing test was performed in exactly the same manner as in Experimental Example 1.
[0111] As a result, the diamond surface is not completely ground.
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Abstract
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