Intelligent PID control system for roller temperature of multi-wire saw, and control method thereof

Abstract

The invention belongs to the technical field of temperature control systems and discloses an intelligent PID control system for roller temperature of a multi-wire saw, and a control method thereof. The intelligent PID control system for the roller temperature of the multi-wire saw is characterized in that real-time temperature of rollers is collected in real time through a temperature sensor and a PLC (programmable logic controller) with an internal PID closed-loop control module, different temperature changes are distinguished according to preset control programs, operating modes of an online heating device and the PID closed-loop control module are switched, analog signals are output to control the online heating device, the rollers and the opening of a three-way adjusting valve which is connected with cooling water and which feeds water to the rollers, temperature and flow of incoming water are changed for the rollers, and the roller temperature is kept stable. The system and the method combing intelligent control and traditional PID control have the advantages that the limits of the traditional PID control in actual production are overcome and efficiency in controlling roller temperature of the multi-wire saw is improved.

Description

technical field [0001] The invention relates to a temperature control system, in particular to an intelligent PID control system and control method for shaft and roll temperature of a multi-wire cutting machine for semiconductors. Background technique [0002] Multi-wire cutting machine is the main equipment for the production of silicon wafers for semiconductors. The temperature of the rollers of the multi-wire cutting machine is a key factor affecting the quality of silicon wafers. Because the temperature of the shaft roll of the multi-wire cutting machine will cause the thermal deformation of the shaft roll, resulting in changes in the arrangement of the cutting wire network, which will affect the parameters such as the curvature and warpage of the silicon wafer beyond the production requirements. [0003] The commonly used temperature controller only has a one-way control function. The cooling water supply temperature of the multi-wire cutting machine is about 13°C, and...

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Problems solved by technology

[0004] However, due to the large hysteresis of the temperature control system of the shaft and roll, and it is easily affected by mortar, cutting heat and other random noises, in practical applications, conventional PID control is difficult to meet production requirements

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