Copper-platinum alloy wire for connecting in semiconductor apparatus
A platinum alloy and semiconductor technology, which is applied in the field of copper-platinum alloy wire, can solve instability and other problems, and achieve the effect of preventing chip cracking and not improving dynamic strength
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[0054] As Examples 1 to 30 and Comparative Examples 1 to 6, copper alloy thick wires each having a diameter of 5 mm were prepared by melting the alloys of the compositions shown in Table 1 and performing continuous casting.
[0055] From the surface of the copper-platinum alloy thick wire of Example 1, platinum (Pt) and copper (Cu) ( figure 1 ) and oxygen (O) concentrations. The horizontal axis of the graph represents the depth (μm) from the bold line surface, and the vertical axis represents the relative secondary ion intensity (log) of the depth.
[0056] according to figure 1 , platinum (Pt) does not exist on the surface layer, and up to 50 nm, platinum (Pt) has a lower relative secondary ionic strength than the solid solution matrix. In contrast, it is apparent that copper (Cu) has a significantly higher purity near the surface.
[0057] according to figure 2 , oxygen (O) decreases linearly from the surface layer to 50 nm, and no longer invades the center from 50 nm...
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