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Piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and preparation method thereof

An electrostatic detection, piezoelectric drive technology, applied in gyroscope/steering induction equipment, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, etc. It is difficult to achieve high precision, low signal sensitivity, poor impact resistance and other problems, and achieve the effect of simple structure, simple manufacturing process, and easy process processing.

Active Publication Date: 2013-09-25
SHANGHAI JIAO TONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] This technology has the following disadvantages: the gyroscope adopts the traditional spring-mass structure model, the signal sensitivity obtained is not high, the Q value is low, the zero drift is too large, the impact resistance is poor, and it is difficult to achieve high precision

Method used

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  • Piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and preparation method thereof
  • Piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and preparation method thereof
  • Piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and preparation method thereof

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Embodiment Construction

[0030] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0031] Such as figure 1 , figure 2 , image 3 As shown, this embodiment includes:

[0032] A piezoelectric disc vibrator 1 without a release hole;

[0033] a support column 2 located at the center below the disc vibrator 1;

[0034] Substrate 3;

[0035] a driving electrode 4 located on the disc vibrator 1;

[0036] With the detection electrode 5, the balance electrode 6 and the common electrode 7 located on the substrate 3;

[0037] The detection electrode 5 , the balance electrode 6 and ...

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Abstract

The invention relates to a piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and a preparation method thereof. The piezoelectric-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope comprises a piezoelectric disk vibrator without a release hole, a cylindrical support column, a drive electrode distributed on the disk vibrator, and a detection electrode, an equilibrium electrode and a common electrode which are distributed on a substrate, wherein the drive electrode is distributed on the disk vibrator; and the detection electrode, equilibrium electrode and common electrode are circumferentially distributed on the substrate and positioned below the disk vibrator, are parallel to the disk vibrator and respectively have a clearance with the disk vibrator. The microgyroscope is driven by utilizing the piezoelectric effect; and meanwhile, the non-contact equilibrium electrode is utilized to apply potential to the lower electrode, so that the gyroscope structure is optimized. By adopting an MEMS (micro-electromechanical systems) processing technique, the manufacturing method has the advantages of simple manufacturing technique and high reliability, and can ensure lower cost and higher yield. The microgyroscope has the advantages of small size and simple structure; and the processing technique is easy to implement and suitable for mass production.

Description

technical field [0001] The present invention relates to a micro-gyroscope in the field of micro-electromechanical technology and a preparation method thereof, in particular to a three-axis micro-gyroscope with a disk-shaped resonator utilizing bulk acoustic wave saddle resonance mode and its Preparation. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, high reliability, and adaptability to various harsh environments. [0003] After searching the literature of the existing technology, it was found that the Chinese patent "Double-axis MEMS gyroscope" (patent application...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5691B81B7/02
Inventor 张卫平成宇翔唐健张弓许仲兴陈文元汪濙海
Owner SHANGHAI JIAO TONG UNIV
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