MEMS vibration energy collector based on PZT piezoelectric beam array

Abstract

The invention provides an MEMS vibration energy collector based on a PZT piezoelectric beam array. The MEMS vibration energy collector is composed of a plurality of PZT piezoelectric beams, a mass block and an outer frame. Each PTZ piezoelectric beam comprises a silicon substrate, a lower electrode, a PZT piezoelectric film and an upper electrode. One ends of the piezoelectric beams are fixed on the outer frame. The other ends of the piezoelectric beams share the mass block. The piezoelectric beams are arranged to be an array in the width direction. Gaps are formed between the adjacent piezoelectric beams. The PZT piezoelectric beams are in series connection through metal wires. Currents are output by two welding points. With the structure, the MEMS vibration energy collector has the advantages that due to the fact that the PZT piezoelectric beam array shares the mass block, the resonant frequency and the vibration phase of the structure can be the same, and the output voltage can be increased due to the direction series connection; due to the fact that the gaps between the adjacent piezoelectric beams, air damping of the structure can be reduced, and the vibration amplitude is increased; due to the fact that the area of the single piezoelectric beam is small, the rate of finished products of devices can be improved. The MEMS vibration energy collector is small in size, high in output voltage and particularly suitable for supply power to wireless sensor network nodes.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical systems (MEMS), and in particular relates to micro-energy technologies for acquiring and converting environmental vibration energy. Background technique [0002] With the development of IC technology, MEMS technology and wireless communication technology, more and more micro sensors and micro actuators are emerging. Traditional batteries are bulky and short-lived, limiting the application of microsystems. Micro-energy can obtain environmental energy and convert it into electrical energy. It has the advantages of small size, long life, and maintenance-free. It is one of the effective ways to solve the above problems. The MEMS vibration energy harvester based on the piezoelectric effect can convert the vibration energy in the environment into electrical energy. It has a simple structure and is easy to miniaturize and integrate. There are broad application prospects in the system field. [0...

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Problems solved by technology

However, the relative dielectric constant is relatively large, resulting in low output voltage and large rectification loss, making it difficult to supply power to the load ([1] S. C. Lin, B. S. Lee, W. J. Wu, C. K. Lee. Multi-cantilever piezoelectric MEMS generator in energy harvesting. 2009 IEEE International Ultrasonics Symposium Proceedings. 755-758.)

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