Winding evaporation type vacuum coating machine

A vacuum coating machine, evaporative technology, applied in the direction of vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of laborious, reduced production efficiency, time-consuming, etc., to improve anti-oxidation ability and improve production The effect of efficiency and simple process

Inactive Publication Date: 2013-10-23

郑州华翔电子信息技术有限公司

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AI-Extracted Technical Summary

Problems solved by technology

[0002] At present, zinc-aluminum composite evaporation technology is used in China, but the zinc-aluminum composite film after plating is easy to oxidize in the atmosphere, and has high requirements for storage. It needs vacuum packaging and keeps the ambient temperature and humidity constant.

The zinc-aluminum composite film has poorer adhesion than the aluminum film, and requires two sets of equipment to vaporize the aluminum film and vaporize the zinc film respectively. When replacing the two sets of equipment, it will be time-consumin...

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Method used

Zinc-aluminum film adopts edge thickening technology, and this equipment also will adopt same technology to produce aluminum film edge thickening, has the advantages such as zinc-aluminum film pressure-resistant high, low loss, has improved the oxidation resistance capacity of film again simultaneously, Coating and edge thickening are completed ...

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Abstract

The invention belongs to the technical field of vacuum coating, and especially relates to a winding evaporation type vacuum coating machine. The vacuum coating machine comprises a vacuum chamber, and a rolling evaporation system, a shielding system and a motor which are arranged in the vacuum chamber. An unwinding shaft is arranged at the top left corner of the vacuum chamber, a winding shaft is arranged at the top right angle of the vacuum chamber, a first evaporation coating drum and a second evaporation coating drum are arranged between the unwinding shaft and the winding shaft side by side, and are positioned below the unwinding shaft and the winding shaft. A first aluminum evaporator is positioned just below the first evaporation coating drum, and a second aluminum evaporator is positioned just below the second evaporation coating drum; and the shielding system is positioned at the bottom right corner of the vacuum chamber, the shielding steel band of the shielding system traverses between the second aluminum evaporator and the second evaporation coating drum, and the aluminum recovery device of the shielding system is arranged at the bottom right of the shielding system. Each of the winding evaporation system and the shielding system is connected with the motor. The vacuum coating machine has the advantages of one-time completion of the coating and edge thickening, long storage time, stable and unchanged performances, simple operation and production efficiency increase.

Application Domain

Vacuum evaporation coatingSputtering coating +1

Technology Topic

AluminiumEvaporator +4

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Examples

Experimental program(1)

Example Embodiment

[0015] The present invention will be further described in detail below with reference to the accompanying drawings.

[0016] like figure 1 As shown, a winding evaporation type vacuum coating machine includes a vacuum chamber 1 , a winding evaporation system 2 , a shielding system 3 and a motor arranged in the vacuum chamber 1 .

[0017] The winding evaporation system 2 includes a hair reel 4, a No. 1 evaporation drum 5, a No. 2 evaporation drum 6, a winding shaft 7, a No. 1 aluminum evaporator 8 and a No. 2 aluminum evaporator 9; the hair reel 4 It is arranged in the upper left corner of the vacuum chamber 1, the winding shaft 7 is arranged in the upper right corner of the vacuum chamber 1, and the No. 1 vapor deposition drum 5 and the No. Below the reel 4 and the take-up reel 7; the No. 1 aluminum evaporator 8 is directly below the No. 1 evaporation drum 5, and the No. 2 aluminum evaporator 9 is directly below the No. 2 evaporation drum 6; The shielding system 3 is in the vacuum chamber 1. The lower right corner, including the shielded steel belt roller 10, the shielded steel belt 11 and the aluminum recovery device 12, the shielded steel belt 11 is connected to the shielded steel belt roller 10 in a driving manner, and the shielded steel belt 11 passes through the No. 2 aluminum evaporator 9 and No. 2 Between the evaporation drums 6 , the aluminum recovery device 12 is arranged at the lower right of the shielding system 3 ; the winding evaporation system 2 and the shielding system 3 are both connected to the motor.

[0018] The hair reel 4, the No. 1 evaporation drum 5, the No. 2 evaporation drum 6 and the take-up reel 7 of the present invention are all cylindrical, and their heights are all equal.

[0019] The present invention also includes a plurality of film guide rollers 13, and the hair reel 4, No. 1 vapor deposition drum 5, No. 2 vapor deposition drum 6, take-up reel 7 and film guide roller 13 are connected by the film material to be coated.

[0020] The width of the shielding steel strip 11 in the present invention is smaller than the width of the film material.

[0021] The shielding steel belt 11 and the shielding steel belt roller 10 according to the present invention are detachably connected, and the shielding steel belt 11 can be freely disassembled and replaced.

[0022] The film material starts from the hair reel 4, adopts the double evaporation technology, and reaches the No. 1 evaporation drum 5 through the film guide roller 13. The average square resistance is first evaporated by the No. 1 aluminum evaporator 8, and then reaches the second through the film guide roller 13. The No. 2 evaporation drum 6 is evaporated by the No. 2 aluminum evaporator 9 to thicken the area resistance. The principle of the average square resistance of evaporation is the same as the original equipment. In the thickening area of the second evaporation, the steel strip shielding technology is used. During evaporation, the shielding steel strip 11 blocks the aluminum from reaching the surface of the film material, only wider than The part of the film material of the shielding steel strip 11 will be coated with a thickened aluminum layer. The shielding steel strip 11 cools the aluminum, and the excess aluminum is recovered at the aluminum recovery device 12, that is, when the thickening area is evaporated, the aluminum molecules in the non-thickening area are evaporated on the surface of the steel strip and then recycled. After the thickened film is evaporated, the film material is collected at the take-up reel 7 via the film guide roller 13 .

[0023] The 4 shielding steel strip rolls 10 that drag the shielding steel strip 11 adopt cooling technology, that is, the roll surface is cooled to -20°C~-15°C in order to protect the steel strip from heating and deformation caused by long-term operation. The belt roller 10 can be tensioned automatically or manually to prevent misalignment. In the present invention, shielding steel strips 11 with different widths can also be replaced, so that films of various specifications with different widths can be evaporated. When evaporating aluminum thickened film, the vacuum of the chamber body should be drawn to less than 5.0×10￣3Pa.

[0024] The bonding force between aluminum and the base film is strong, and a dense aluminum oxide film is formed on the surface of the aluminum layer in the air. This aluminum oxide film can protect the inner layer of aluminum from being further oxidized, so the aluminum metallized film is in the air. Long storage time, stable performance. The invention avoids the disadvantages of difficult preservation and poor adhesion caused by the traditional galvanized aluminum composite film.

[0025] The zinc-aluminum film adopts the edge thickening technology. This equipment will also use the same technology to produce the edge-thickening of the aluminum film, which not only has the advantages of high pressure resistance and low loss of the zinc-aluminum film, but also improves the oxidation resistance of the film, which can be completed at one time. The coating and edge are thickened, the process is simple, and the production efficiency is improved. In the present invention, the metallized film can be stored for 1 to 2 years without being oxidized after the evaporation is completed or cut. With appropriate square resistance, it will greatly improve the use efficiency and various performance indicators of capacitors.

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Description & Claims & Application Information

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the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine

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Classification and recommendation of technical efficacy words

High pressure
Strong combination

System and method for diffusion combustion with fuel-diluent mixing in a stoichiometric exhaust gas recirculation gas turbine system

ActiveUS20140123668A1High pressureLow oxygen contentTurbine/propulsion fuel supply systemsGaseous fuel feeder/distributionExhaust fumesGas turbines

Owner:GENERAL ELECTRIC CO +1

Winding evaporation type vacuum coating machine

AI-Extracted Technical Summary

Problems solved by technology

Method used

Abstract

Image

Examples

Example Embodiment

PUM

Description & Claims & Application Information

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