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Rapid preparation method of nano-grade conical SERS active substrate

A conical, nano-technology, applied in the field of laser Raman spectroscopy and trace drug detection, can solve problems affecting the detection sensitivity and performance of drug detection systems, difficulties, etc., achieve good application prospects, reduce dosage, and have good reproducibility Effect

Inactive Publication Date: 2013-11-20
苏州扬清芯片科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The quality of the active substrate can lead to a difference in the detection concentration level of even more than 10,000 times, which will greatly affect the detection sensitivity and performance of the drug detection system
The active basal SERS enhancement factors reported today are basically in the range of 10 6 Level, there are still some difficulties in ultra-sensitive detection of trace drugs

Method used

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  • Rapid preparation method of nano-grade conical SERS active substrate
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] A single layer of 200nm polystyrene microspheres was spread on the surface of the Si substrate, and after RIE etching (60W, 120s), a 50nm gold film was thermally evaporated on the surface of the substrate. Place the substrate in HF / H 2 o 2 / H 2 O (1:5:10) mixed solution, the etching temperature is 30°C, take it out after etching for 5 minutes, put in 1mol / L sodium hydroxide alkali solution and etch for 2 minutes to obtain a nano-conical silicon array. Evaporate or sputter metal on the surface of the array to obtain a SERS active substrate.

Embodiment 2

[0027] A single layer of 300nm polystyrene microspheres was spread on the surface of the Si substrate, and after RIE etching (80W, 100s), a 50nm silver film was thermally evaporated on the surface of the substrate. Place the substrate in HF / H 2 o 2 / H 2 O (1:5:10) mixed solution, the etching temperature is 25°C, take it out after 5 minutes of etching, put in 0.5mol / L sodium hydroxide alkali solution and etch for 5 minutes to obtain a nano-conical silicon array. Evaporate or sputter metal on the surface of the silicon array to obtain a SERS active substrate.

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Abstract

The invention belongs to the technical fields of laser Raman spectroscopy and trace narcotic testing, and especially relates to a high-sensitivity SERS sensor active substrate used for detecting narcotics, and a preparation method thereof. The invention provides a rapid preparation method of a nano-grade conical SERS active substrate. The nano-grade conical SERS active substrate is a precious metal nano-grade conical array structure coated on a substrate. The precious metal material is silver, copper, and / or gold. The high-sensitivity SERS sensor active substrate has surface-enhanced Raman activity, and has high repeatability. The substrate can be used for detecting trace compounds such as narcotics and explosives.

Description

technical field [0001] The invention belongs to the technical field of laser Raman spectroscopy and trace drug detection, and in particular relates to a high-sensitivity SERS sensor active substrate for detecting drugs and a preparation method thereof; more specifically, the invention relates to a surface-enhanced Raman Active, high repetition rate, high-sensitivity SERS sensor active substrate that can be used for detection of trace compounds such as drugs, explosives, etc., and a preparation method thereof. Background technique [0002] As a common method for analyzing molecular vibrational spectra, laser Raman technology has been widely used in the fields of identifying the molecular structure of substances and analyzing the surface binding state. However, the Raman effect signal is often very weak. When the concentration of the measured molecule is small, or when the surface adsorbed substance is detected, the conventional laser Raman method appears to be unable to do wh...

Claims

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Application Information

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IPC IPC(8): G01N21/65
Inventor 浦鹏董明建
Owner 苏州扬清芯片科技有限公司
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