Rapid preparation method of nano-grade conical SERS active substrate
A conical, nano-technology, applied in the field of laser Raman spectroscopy and trace drug detection, can solve problems affecting the detection sensitivity and performance of drug detection systems, difficulties, etc., achieve good application prospects, reduce dosage, and have good reproducibility Effect
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Embodiment 1
[0025] A single layer of 200nm polystyrene microspheres was spread on the surface of the Si substrate, and after RIE etching (60W, 120s), a 50nm gold film was thermally evaporated on the surface of the substrate. Place the substrate in HF / H 2 o 2 / H 2 O (1:5:10) mixed solution, the etching temperature is 30°C, take it out after etching for 5 minutes, put in 1mol / L sodium hydroxide alkali solution and etch for 2 minutes to obtain a nano-conical silicon array. Evaporate or sputter metal on the surface of the array to obtain a SERS active substrate.
Embodiment 2
[0027] A single layer of 300nm polystyrene microspheres was spread on the surface of the Si substrate, and after RIE etching (80W, 100s), a 50nm silver film was thermally evaporated on the surface of the substrate. Place the substrate in HF / H 2 o 2 / H 2 O (1:5:10) mixed solution, the etching temperature is 25°C, take it out after 5 minutes of etching, put in 0.5mol / L sodium hydroxide alkali solution and etch for 5 minutes to obtain a nano-conical silicon array. Evaporate or sputter metal on the surface of the silicon array to obtain a SERS active substrate.
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