This invention discloses a high-precision proportioning
system and control method for dissolving and mixing
silane mixtures, relating to the field of mixing equipment technology. The
system includes a
raw material storage module consisting of three stainless steel tanks for storing
silane,
diluent gas, and
solvent respectively, with passivated inner walls and insulated outer walls; a precision metering module equipped with a
plunger pump and a
mass flow meter for real-time flow feedback; a
dissolution and mixing module, a double-jacketed tank with atomizing nozzles and a double-layered oblique-blade counter-current stirring
impeller; a
temperature and pressure control module including a jacket temperature controller and a tank top pressure
relief valve; a concentration monitoring module equipped with an online
laser Raman
spectrometer; a
tail gas treatment module consisting of an adsorption
tower and a
catalytic burner; and a central control module using a PLC and
touchscreen to achieve
fully automated control of the entire process. All modules work together to prepare the
mixed gas. This invention improves the proportioning accuracy and
dissolution efficiency of the
silane mixture, stabilizes concentration drift, and provides
environmentally friendly tail gas treatment; it is adaptable to high-precision requirements in various scenarios, providing stable raw materials for downstream processes.