Novel fine metal mask plate for producing organic light emitting diode (OLED) display panel and fabrication method of novel fine metal mask plate

Abstract

The invention discloses a novel fine metal mask plate for producing an organic light emitting diode (OLED) display panel and a fabrication method of the novel fine metal mask plate. The novel fine metal mask plate comprises a border formed by a plurality of through holes formed in a metal substrate, wherein a layer of fine mask is electroformed on the upper surface of the border, so that the fine mask and the border are combined into a whole; the fine mask divides a pattern area and a border area, on which a part with a fine structure is formed; the through holes in the pattern area and the border correspond to each other. The fabrication method comprises the following steps: A, preparing the metal substrate, namely carrying out rough shape cutting on an invar alloy plate or a stainless steel plate, so as to accord with the design size and form the metal substrate; B, fabricating the fine mask, namely coating a photoresist layer on the metal substrate, developing required patterns on the photoresist layer on the metal substrate, and orderly electroforming a metal substrate layer and a metal layer with a low coefficient of thermal expansion, so as to form the fine mask of the mask plate; and C, etching the substrate, namely dividing the pattern area on the refine mask, etching off the metal substrate in a district corresponding to the back part of the pattern area by a chemical etching method, so as to form the through holes, and leaving an external border and an internal partition frame, so that the external border and the internal partition frame jointly support the fine mask.

Description

【Technical field】 [0001] The invention relates to the technical field of semiconductor manufacturing, and more specifically relates to a novel fine metal mask for OLED display panel production and a manufacturing method. 【Background technique】 [0002] The current production of OLED (organic light-emitting diode, also known as organic laser display, which has self-luminous characteristics) display panels with high pixel density requires the use of fine metal masks (Fine Metal Mask, FMM) with very thin thickness and small thermal expansion coefficient. ) as a mask (or shadow mask) for evaporating the organic luminous body (three primary colors) in the pixel of the OLED panel. [0003] The fine metal mask plate for OLED is usually prepared by chemical etching using Invar alloy (INVAR, also known as Invar). First, photoresist or photosensitive dry film is coated on the surface of Invar alloy, and the The fine pattern of the mask plate is transferred on the photosensitive film,...

AI Technical Summary

Problems solved by technology

[0005] In addition, due to the manufacturing process of OLED, it is necessary to prevent the pattern in the fine metal mask from defects caused by residual substances by cleaning every once in a while, which can easily cause damage to some image units in the fine metal mask, so Fine metal masks must be replaced approximately every two months

Due to the above factors, the cost of fine metal masks in the production process of OLED display panels is quite expensive

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