Surface coarsening method of polycrystalline silicon plate
A polysilicon plate, roughening technology, applied in chemical instruments and methods, crystal growth, post-processing details, etc., can solve the problems of post-processing inconvenience, achieve the effects of reducing usage, improving conversion efficiency, and reducing production costs
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0071] S11: Electrode cleaning: select a polycrystalline silicon wafer with a size of 20.0mm×20.0mm, first clean it with ultrasonic for 5 minutes, then clean it with absolute ethanol for 3 minutes, then clean it with ultrasonic for 5 minutes, then wash it repeatedly with absolute ethanol, and finally protect it with nitrogen Standby; use tantalum sheet as the cathode sheet, first use ultrasonic cleaning for 5min, and then use nitrogen protection for standby. Test the resistance change of the above polysilicon wafer and tantalum wafer to ensure good contact between the polysilicon wafer and the tantalum wafer;
[0072] S12: Solution preparation: prepare a corrosion electrolyte, mix hydrofluoric acid and absolute ethanol at a volume ratio of 1:1 to prepare a corrosion electrolyte; the total volume is 380ml, the pH value is 0.7, and the temperature is 15°C.
[0073] S13: Electrochemical corrosion reaction: Establish a working electrode and an inert electrode in a PP reaction tank...
Embodiment 2
[0077] S21: Electrode cleaning: select a polysilicon wafer with a size of 20.0mm×20.0mm, first use ultrasonic cleaning for 4 minutes, then clean it with absolute ethanol for 1 minute, then use ultrasonic cleaning for 4 minutes, then wash it repeatedly with absolute ethanol, and finally protect it with nitrogen Standby; use tantalum sheet as the cathode sheet, first use ultrasonic cleaning for 4min, and then use nitrogen protection for standby. Test the resistance change of the above polysilicon wafer and tantalum wafer to ensure good contact between the polysilicon wafer and the tantalum wafer;
[0078] S22: Solution preparation: prepare a corrosion electrolyte, mix hydrofluoric acid and absolute ethanol at a volume ratio of 1:2 to prepare a corrosion electrolyte; the total volume is 380ml, the pH value is 1.2, and the temperature is 17°C.
[0079] S23: Electrochemical corrosion reaction: Establish a working electrode and an inert electrode in a PP reaction tank with a size of...
PUM
| Property | Measurement | Unit |
|---|---|---|
| depth | aaaaa | aaaaa |
| pore size | aaaaa | aaaaa |
| depth | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 