Uniaxial two-way micro mechanical measurement device and method for scanning micro environment

Abstract

The invention belongs to the fields of micro-nano mechanics and precision machinery, and in particular relates to a uniaxial two-way micro mechanical measurement device and method for a scanning micro environment. According to the device, symmetrical coordinate type three-dimensional coarse-tuning translation stages, symmetrical fine-tuning three-dimensional moving precision platforms and a sample platform are installed on a main support unit. Through the control operation of a control system and a manipulation unit, the device can be used for detecting micro-nano characteristic scale materials and a structural mechanical property, and can realize one-way centering stretch, compressing, bending and vibration measurement and micro-nano scale sample surface deformation and micro-structural evolution detection. The device can be repeatedly used and can combine a digital image / speckle correlation technique, an image processing technique or a micro-labeling technique to detect the in-situ deformation and mechanical property of samples in a high-spatial-discrimination scanning microscopic environment.

Description

technical field [0001] The invention belongs to the field of micro-nano mechanics and precision machinery, and in particular relates to a single-axis bidirectional micro-mechanical measuring device and a measuring method for scanning a micro-environment. Background technique [0002] As an important part of the field of micro-nano science, micro-nano mechanical experiments play an important and irreplaceable role in the detection and verification of the mechanical properties of micro-nano-scale materials, structures and devices. Its initial requirements come from the research requirements on the mechanical properties of small-scale materials, from the prediction and analysis of the performance and reliability of MEMS and other micro-scale devices, and from the fine, multi-scale models that can describe the mechanical behavior of complex structural materials verification. In particular, due to the reduction of the characteristic size of materials and structures, new mechanic...

AI Technical Summary

Problems solved by technology

Although these testing machines are closer to the micro-scale in terms of load, displacement range and resolution compared with the previous macro testing machines, they still mainly use the principle of traditional material testing machines. And the displacement is much larger than the range required by micro-nano materials, and the instrument is expensive

On the other hand, in view of the difficulties of commercial experimental machines, researchers at home and abroad have developed some experimental devices for the mechanical properties of micro-nano materials with more advanced functions and performances according to their own needs. The system is not a complete material testing machine, and most of them are temporary construction systems, which can only complete part of the mechanical property measurement unit)

This kind of material mechanical property detection device or system developed by researchers earlier is relatively cheap and suitable for the mechanical property detection of some special materials or structures, but most of the devices can only work under the optical microscope platform and cannot Meet the mechanical performance testing of materials and structures at the micro-nano scale, let alone the requirements for clamping and manipulation of micro-structures under the conditions of micro-nano scale testing

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