Uniaxial two-way micro mechanical measurement device and method for scanning micro environment

Abstract

The invention belongs to the fields of micro-nano mechanics and precision machinery, and in particular relates to a uniaxial two-way micro mechanical measurement device and method for a scanning micro environment. According to the device, symmetrical coordinate type three-dimensional coarse-tuning translation stages, symmetrical fine-tuning three-dimensional moving precision platforms and a sample platform are installed on a main support unit. Through the control operation of a control system and a manipulation unit, the device can be used for detecting micro-nano characteristic scale materials and a structural mechanical property, and can realize one-way centering stretch, compressing, bending and vibration measurement and micro-nano scale sample surface deformation and micro-structural evolution detection. The device can be repeatedly used and can combine a digital image / speckle correlation technique, an image processing technique or a micro-labeling technique to detect the in-situ deformation and mechanical property of samples in a high-spatial-discrimination scanning microscopic environment.

Description

technical field

[0001] The invention belongs to the field of micro-nano mechanics and precision machinery, and in particular relates to a single-axis bidirectional micro-mechanical measuring device and a measuring method for scanning a micro-environment. Background technique

[0002] As an important part of the field of micro-nano science, micro-nano mechanical experiments play an important and irreplaceable role in the detection and verification of the mechanical properties of micro-nano-scale materials, structures and devices. Its initial requirements come from the research requirements on the mechanical properties of small-scale materials, from the prediction and analysis of the performance and reliability of MEMS and other micro-scale devices, and from the fine, multi-scale models that can describe the mechanical behavior of complex structural materials verification. In particular, due to the reduction of the characteristic size of materials and structures, new mechanic...

Examples

Embodiment Construction

[0026] The present invention provides a kind of uniaxial bidirectional micromechanical measurement device and measurement method for scanning microenvironment. The uniaxial bidirectional tension detection under SEM microsystem is taken as an example below, and the principles and details of the present invention are explained in conjunction with the accompanying drawings. The structure and tensile testing method are further explained.

[0027] Such as figure 1 As shown, the overall support unit 13 is a rectangular aluminum alloy plate (175mm×95mm×7mm), the surface is sprayed with silver metallic paint, the overall support unit 13 is installed on the base 14 of the SEM sample stage, and there are two positioning pins between the two 16. Three M4-20 inner hexagonal screws 12 are connected. A circular hole with a diameter of 48 mm is provided at the center of the upper surface of the integral support unit 13, and the SEM sample stage 15 passes through the central circular hole of...

technical field

[0001] The invention belongs to the field of micro-nano mechanics and precision machinery, and in particular relates to a single-axis bidirectional micro-mechanical measuring device and a measuring method for scanning a micro-environment. Background technique

[0002] As an important part of the field of micro-nano science, micro-nano mechanical experiments play an important and irreplaceable role in the detection and verification of the mechanical properties of micro-nano-scale materials, structures and devices. Its initial requirements come from the research requirements on the mechanical properties of small-scale materials, from the prediction and analysis of the performance and reliability of MEMS and other micro-scale devices, and from the fine, multi-scale models that can describe the mechanical behavior of complex structural materials verification. In particular, due to the reduction of the characteristic size of materials and structures, new mechanic...

Examples

Embodiment Construction

[0026] The present invention provides a kind of uniaxial bidirectional micromechanical measurement device and measurement method for scanning microenvironment. The uniaxial bidirectional tension detection under SEM microsystem is taken as an example below, and the principles and details of the present invention are explained in conjunction with the accompanying drawings. The structure and tensile testing method are further explained.

[0027] Such as figure 1 As shown, the overall support unit 13 is a rectangular aluminum alloy plate (175mm×95mm×7mm), the surface is sprayed with silver metallic paint, the overall support unit 13 is installed on the base 14 of the SEM sample stage, and there are two positioning pins between the two 16. Three M4-20 inner hexagonal screws 12 are connected. A circular hole with a diameter of 48 mm is provided at the center of the upper surface of the integral support unit 13, and the SEM sample stage 15 passes through the central circular hole of...

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