Uniaxial two-way micro mechanical measurement device and method for scanning micro environment
A uniaxial, bidirectional, scanning microscopy technique, used in measuring devices, using stable bending force to test material strength, and using stable tension/pressure to test material strength, etc. Implementation, expensive instruments, etc.
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[0026] The present invention provides a uniaxial bidirectional micromechanics measurement device and measurement method for scanning a microscopic environment. The following takes uniaxial biaxial stretching detection under a SEM microscope system as an example, and the principle and specific details of the present invention are described in conjunction with the accompanying drawings. The structure and tensile testing methods are further explained.
[0027] Such as figure 1 As shown, the integral support unit 13 is a rectangular aluminum alloy flat plate (175mm×95mm×7mm) with silver metallic paint sprayed on the surface. The integral support unit 13 is installed on the SEM sample stage base 14 with two positioning pins between them 16. Three M4-20 hexagon socket screws 12 are connected. A circular hole with a diameter of 48 mm is provided at the center of the upper surface of the integral support unit 13, and the SEM sample stage 15 passes through the central circular hole of th...
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