Textured transparent conductive thin film with periodic structure and preparation method thereof

Abstract

Provided is textured transparent conductive thin film with a periodic structure. The textured transparent conductive thin film with the periodic structure comprises a glass substrate layer, first layer ZnO thin film which plays a role in a template, and second layer ZnO thin film which plays a role in modification, wherein a laminated structure is formed by the glass substrate layer, the first layer ZnO thin film and the second layer ZnO thin film in sequence, the thickness of the first layer ZnO thin film is 300-1500nm, the thickness of the second layer ZnO thin film is 400-1000nm, and the textured transparent conductive thin film which has the scattering effect and is of the periodic structure is formed. A preparation method of the textured transparent conductive thin film with the periodic structure comprises the steps of using the water bath method to assemble PS microspheres, using O2 to carry out plasma etching on the PS microspheres, and obtaining the light-trapping ZnO transparent conductive thin film with the periodic structure through the template effect of the PS microspheres. The textured transparent conductive thin film with the periodic structure and the preparation method of the textured transparent conductive thin film with the periodic structure have the advantages that the prepared ZnO transparent conductive thin film has the good light-trapping effect, can serve as a front electrode to be applied to a thin film solar cell, and have a good scattering effect within the range of the wavelength which can be used by cells with the size of 400-1100nm, the optical distance of incident light in silicon-based thin-film cells can be increased, and the use ratio of light can be improved.

Description

technical field [0001] The invention belongs to the preparation technology of a transparent conductive film of a thin film solar cell, in particular to a suede transparent conductive film with a periodic structure and a preparation method thereof. Background technique [0002] In the 21st century, energy security and environmental protection have become global issues. Many countries in the world regard the development of renewable energy as an important measure to alleviate energy supply contradictions and address climate change, and have formulated development strategies, put forward clear development goals and corresponding incentive policies. Photovoltaic power generation is one of the internationally recognized effective ways to solve the problems of energy shortage and environmental pollution. The carrier of photovoltaic power generation is solar cells, and the key to making solar cells an important part of future energy is to reduce the cost of photovoltaic power gen...

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Problems solved by technology

However, in order to obtain good light trapping after wet etching of ZnO films prepared by sputtering technology, the "crater-like" feature size and roughness need to be large, and such ZnO films can o

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