Protection material for plasma spray header as well as preparation method and application method thereof
A technology for protecting materials and spraying heads, which is applied in the field of protective materials for ion spraying heads and its preparation, which can solve the problems of unfavorable maintenance, damage, and limitation of the service life of plasma equipment spraying systems, etc., and achieve excellent anti-plasma Corrosion, reduce production cost, improve the effect of hydration resistance
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[0018] Example 1
[0019] The protective material for the plasma shower head of this embodiment has a ratio of 0.5 wt% for calcium oxide (CaO) with a purity of 99.9wt%, and yttrium oxide (Y 2 O 3 ) Use 1 wt%, and the rest uses the main material-magnesium oxide (MgO) with a purity of 99.5 wt%.
[0020] During preparation, weigh the three powders according to the above-mentioned ratio, then place them in a ball mill and use ZTA ceramic balls to grind and mix them for 12 hours. The mixed powders are put into a mold for cold pressing, and then the materials are placed The crucible is placed on the sintering table of a vacuum graphite furnace, and vacuum is applied for pressureless sintering. Specifically, when the vacuum degree is less than 1x10 -2 Start heating at mbar, the heating rate is 10°C / min, and the sintering temperature is kept at 1500°C for 90 minutes, and then cooled naturally to obtain the finished protective material.
[0021] When the protective material is applied to the...
Example Embodiment
[0023] Example 2
[0024] The protective material for the plasma shower head of this embodiment has a ratio of: 1 wt% for calcium oxide (CaO) with a purity of 99.9wt% and yttrium oxide (Y 2 O 3 ) Use 0.5 wt%, and the rest is the main material-magnesium oxide (MgO) with a purity of 99.5 wt%.
[0025] Using the same preparation method and coating method as in Example 1, the coated plasma shower head is used in semiconductor etching production, and the service life can reach about 660 hours after testing.
Example Embodiment
[0026] Example 3
[0027] The protective material for the plasma shower head of this embodiment has a ratio of 1.5 wt% for calcium oxide (CaO) with a purity of 99.9wt% and yttrium oxide (Y 2 O 3 ) Use 1 wt%, and the rest uses the main material-magnesium oxide (MgO) with a purity of 99.5 wt%.
[0028] The plasma shower head after coating is obtained by the same preparation method and coating method as in Example 1 for use in semiconductor etching production. After testing, the service life can reach about 685 hours.
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