Composite accelerometer based on capacitance effect and tunnel effect

An accelerometer and tunnel effect technology, applied in the field of micro-inertial navigation, can solve the problems of easy damage to the tunnel tip, limited range, poor anti-overload capability, etc., and achieve the effect of avoiding damage to the device, wide detection range, and low detection threshold.

Active Publication Date: 2014-01-29
ZHONGBEI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the distance between the tunnel tip and the electrode plate must be at the nanometer level during operation, the measuring range is limited, the overload resistance is poor, and the tunnel tip is easily damaged when the overload is high.

Method used

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  • Composite accelerometer based on capacitance effect and tunnel effect
  • Composite accelerometer based on capacitance effect and tunnel effect
  • Composite accelerometer based on capacitance effect and tunnel effect

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Embodiment Construction

[0030] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0031] In the description of the present invention, it should be understood that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right" etc. are based on the attached The orientation or positional relationship shown in the figure is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific ...

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Abstract

The invention discloses a composite accelerometer based on a capacitance effect and a tunnel effect. The composite accelerometer comprises a bonding substrate, a cushion liner frame body, a supporting frame body, a cantilever beam and a mass block. A tunnel point is arranged at the center of the lower surface of the mass block. The composite accelerometer based on the capacitance effect and the tunnel effect has the advantages of adopting the manner of integrating capacitance detection and tunnel effect detection and detecting a capacitor and a tunnel. Detection of a low detection threshold value, a wide range and high sensitivity of an acceleration speed is achieved. Meanwhile, accurate measurement of the acceleration speed of a known acceleration speed value circumstance is carried out. The integrated design is adopted and the composite accelerometer is reasonable in structure, high in sensitivity, simple in detection circuit, convenient to use, good in reliability and suitable for microminiaturization.

Description

technical field [0001] The invention relates to the related field of micro-inertial navigation technology, in particular to a composite micro-mechanical accelerometer based on capacitance effect and tunnel effect. [0002] Background technique [0003] With the development of micromechanical system (MEMS) technology, it has the characteristics of low cost, small size, easy mass production and good integration, and has attracted more and more attention from people, and has been widely used in civilian and military fields. . However, due to the limitation of key performance indicators, micromechanical sensors have not been fully applied in military, aerospace, aviation and other cutting-edge fields. Among them, sensitivity and measuring range are key indicators for micromechanical sensors to be improved. For sensors manufactured using mainstream principles, high sensitivity is usually accompanied by small measuring range and low overload. [0004] With the development of sc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125B81B7/02
Inventor 李孟委王莉朱京王琪白晓晓王增跃刘俊
Owner ZHONGBEI UNIV
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