Method for improving laser preprocessing efficiency of optical element small light spot scanning

Abstract

Provided is a method for improving the laser preprocessing efficiency of optical element small light spot scanning. The method comprises the steps that the position coordinates of a movement starting point and a movement terminal point of each line of samples are calculated according to required preprocessing sample area Amm*Bmm and the center-to-center spacing L and the compensation distance L0 of adjacent irradiation light spots; a computer controls the samples to make uniform motion line by line according to the position coordinates and acquires the position information of sample motion trails in real time, and meanwhile the computer controls a laser device to output pulse laser to irradiate the samples to conduct laser preprocessing on the surface of an optical element at a fixed frequency mu. The method is simple and easy to execute, the arraying trajectory of a square or an equilateral triangle on the surfaces of the samples of the adjacent irradiation light spots can be guaranteed, and the working efficiency of laser preprocessing of optical element small light spot scanning is effectively improved.

Description

technical field [0001] The invention relates to an optical element, in particular to a method for improving the pretreatment efficiency of the small light spot scanning laser of the optical element. Background technique [0002] Laser pretreatment technology is an effective means to improve the ability of optical components to resist laser damage. Small spot scanning laser pretreatment can flexibly control the laser beam to irradiate the entire aperture of optical components with the required energy and ideal uniformity, and The system is simple to build and has been favored by the majority of users. Small-spot scanning laser pretreatment is a process of irradiating the surface of the optical element point by point with a certain laser energy flow. Adjacent irradiation spots are required to be arranged in a square or equilateral triangle on the sample surface (“An overview of raster scanning for ICF- class laser optics”, Proc. SPIE, 4932, 2003, p139). .In the preprocessing...

AI Technical Summary

Problems solved by technology

During this process, the motor drives the sample to move to each irradiation position and must remain in a static state ("Study on laser pretreatment of optical thin film with small spot scanning", Acta Optics Sinica, 19(8), 1999, p1106; "0.532μm laser Research on laser pretreatment of optical thin films with small spot scanning", China Laser, 26(8), 1999, p764; "Laser energy coverage of defects in laser pretreatment", Strong Laser and Ion Beam, 24(6), 2012, p1389), after the laser irradiates the current irradiation position, the sample moves to the next irradiation position for laser irradiation at the next irradiation position. This traditional way of starting and stopping the sample severely limits the size of the optical element. The working efficiency of the spot scanning preprocessing system, especially for the large area small spot scanning laser preprocessing process, is time-consuming.

Images