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A kind of additive for making texture of polycrystalline silicon chip and its application

A technology of polysilicon wafers and additives, applied in sustainable manufacturing/processing, crystal growth, final product manufacturing, etc., can solve the problems of poor texture stability, large texture size, poor uniformity, etc. High sheet efficiency, good uniformity, and the effect of reducing reflectivity

Active Publication Date: 2016-08-31
CHANGZHOU SHICHUANG ENERGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are some problems in the texturing of this acid solution: the size of the suede surface is large and the uniformity is not good, the crystal flower is relatively obvious, the reflectivity is slightly high, and the stability of the texturing is not good

Method used

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  • A kind of additive for making texture of polycrystalline silicon chip and its application

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Apply the texturing process of polycrystalline silicon sheet texturing additive of the present invention, take following process steps:

[0022] 1) Preparation of velvet additives: using deionized water as a solvent, dissolve 0.1g of sodium citrate, 0.1g of polyvinyl alcohol, 2g of hydrolyzed polymaleic anhydride, and 0.05g of fluorocarbon surfactant in deionized water to obtain 100g of fleece additives;

[0023] 2) Configure the texturing solution: dissolve 3kg of HF aqueous solution (the mass percentage of HF in the HF aqueous solution is 49%) and 0.05kg of chromium trioxide in deionized water to obtain 10kg of acid solution; then in the acid solution Add 100g of the texturing additive made in step 1) to obtain the texturing liquid;

[0024] 3) Texturing: Dip the polysilicon cell into the texturing solution for surface texturing, the texturing temperature is 10°C, and the texturing time is 1200s.

Embodiment 2

[0026] Apply the texturing process of polycrystalline silicon sheet texturing additive of the present invention, take following process steps:

[0027] 1) Preparation of texturing additives: using deionized water as a solvent, dissolve 2g of sodium citrate, 2g of polyvinyl alcohol, 20g of hydrolyzed polymaleic anhydride, and 0.32g of fluorocarbon surfactant in deionized water to obtain 400g of texturing additives ;

[0028] 2) Configure the texturing solution: dissolve 6kg of HF aqueous solution (the mass percentage of HF in the HF aqueous solution is 49%) and 0.2kg of chromium trioxide in deionized water to obtain 10kg of acid solution; then in the acid solution Add 400g of the texturing additive made in step 1) to obtain the texturing liquid;

[0029] 3) Texturing: Dip the polysilicon cell into the texturing solution for surface texturing, the texturing temperature is 30°C, and the texturing time is 300s.

Embodiment 3

[0031] Apply the texturing process of polycrystalline silicon sheet texturing additive of the present invention, take following process step:

[0032] 1) Preparation of velvet additives: using deionized water as a solvent, dissolve 0.6g sodium citrate, 0.6g polyvinyl alcohol, 7g hydrolyzed polymaleic anhydride, and 0.13g fluorocarbon surfactant in deionized water to obtain 200g of fleece additives;

[0033] 2) Configure the texturing solution: dissolve 4.5kg of HF aqueous solution (the mass percentage of HF in the HF aqueous solution is 49%) and 0.125kg of chromium trioxide in deionized water to obtain 10kg of acid solution; Add 200g of the texturing additive made in step 1) to the solution to obtain the texturing liquid;

[0034] 3) Texturing: Dip the polysilicon cell into the texturing solution for surface texturing, the texturing temperature is 20°C, and the texturing time is 750s.

[0035] figure 1 It is the scanning electron micrograph of the suede surface of the polyc...

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Abstract

The invention provides a texturing additive for chromic acid texturing of polycrystalline silicon wafers. The present invention also provides a texturing solution for chromic acid texturing of polycrystalline silicon wafers, which contains a mixed acid solution of chromic acid and hydrofluoric acid and the above-mentioned polycrystalline silicon wafer texturing additives. The invention also provides a method for making texture of a polycrystalline silicon wafer, which uses the above-mentioned texturing liquid to texture the surface of the polycrystalline silicon wafer. The polycrystalline silicon wafer texturing additive affects the texturing reaction process, controls the reaction speed of acid corrosion on various crystal faces, and makes different crystal faces reach the same corrosion rate, so that a textured structure with good uniformity and blurred crystal flowers can be obtained, effectively weakening Polycrystalline crystal flower can reduce reflectivity and improve current and efficiency at the same time.

Description

technical field [0001] The invention relates to a polycrystalline silicon wafer texturing additive and an application thereof, belonging to the technical field of polycrystalline silicon wafer texturing. Background technique [0002] In the manufacturing process of polycrystalline silicon solar cells, texturing the surface of silicon wafers is a key link. The effect of texturing directly affects the conversion efficiency and yield of the final cell. Since the polycrystalline silicon wafer is composed of crystal flowers with different crystal orientations, and the crystal orientation of each crystal flower is randomly distributed, and the crystal flower is obvious, therefore, in the general texturing process, the wet chemical etching method of acidic solution is often used to process the surface of the polycrystalline silicon wafer. velvet. The texturing process is based on the principle of isotropic corrosion of silicon by acidic solution, forming similar pit-like textures...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B33/10C23F1/24H01L31/18
CPCY02P70/50
Inventor 章圆圆张丽娟
Owner CHANGZHOU SHICHUANG ENERGY CO LTD
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