Unlock instant, AI-driven research and patent intelligence for your innovation.

Reflection cavity type differential confocal measuring method of super-large radius of curvature

A differential confocal and radius measurement technology, used in measurement devices, instruments, optical devices, etc., to improve the fixed focus accuracy, reduce the measurement accuracy, and reduce the moving distance.

Inactive Publication Date: 2014-03-26
BEIJING INSTITUTE OF TECHNOLOGYGY
View PDF7 Cites 6 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to solve the problem of high-precision measurement of ultra-large curvature radius, and propose a method for measuring ultra-large curvature radius with reflective cavity differential confocal

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Reflection cavity type differential confocal measuring method of super-large radius of curvature
  • Reflection cavity type differential confocal measuring method of super-large radius of curvature
  • Reflection cavity type differential confocal measuring method of super-large radius of curvature

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] When the measured lens 7 is a concave lens with a diameter of D=150mm, the reflective cavity differential confocal ultra-large curvature radius measurement device such as figure 2 As shown, the measurement steps are:

[0037] (a) Start the measurement software in the main control computer 22, turn on the laser 20, and the light emitted by the laser 20 is transmitted through the optical fiber 21 to form the point light source 1. The light emitted by the point light source 1 passes through the beam splitter 2 and the collimator lens 3 to form a parallel beam;

[0038](b) Place the lens under test 7 on the adjustment frame 27 , and adjust the lens under test 7 through the adjustment frame 27 so that it has a common optical axis with the collimator lens 3 . The parallel light is irradiated on the measured lens 7, and the measured light beam 14 is converged by the measured lens 7 and irradiated on the rear surface 6 of the parallel flat crystal;

[0039] (c) The measureme...

Embodiment 2

[0046] When the measured lens 7 is a concave lens with a diameter of D=150mm, the reflective cavity differential confocal ultra-large curvature radius measurement device such as figure 2 As shown, the measurement steps are:

[0047] (a) Start the measurement software in the main control computer 22, turn on the laser 20, and the light emitted by the laser 20 is transmitted through the optical fiber 21 to form the point light source 1. The light emitted by the point light source 1 passes through the beam splitter 2 and the collimator lens 3 to form a parallel beam;

[0048] (b) Place the lens under test 7 on the adjustment frame 27 , and adjust the lens under test 7 through the adjustment frame 27 so that it has a common optical axis with the collimator lens 3 . The parallel light is irradiated on the measured lens 7, and the measured light beam 14 is converged by the measured lens 7 and irradiated on the rear surface 6 of the parallel flat crystal;

[0049] (c) The measurem...

Embodiment 3

[0054] When the measured lens 7 is a concave lens with a diameter of D=150mm, the reflective cavity differential confocal ultra-large curvature radius measurement device such as image 3 As shown, the measurement steps are:

[0055] (a) Start the measurement software in the main control computer 22, turn on the laser 20, and the light emitted by the laser 20 is transmitted through the optical fiber 21 to form the point light source 1. The light emitted by the point light source 1 passes through the beam splitter 2 and the collimator lens 3 to form a parallel beam;

[0056] (b) Place the lens under test 7 on the adjustment frame 27 , and adjust the lens under test 7 through the adjustment frame 27 so that it has a common optical axis with the collimator lens 3 . The parallel light is irradiated on the measured lens 7, and the measured light beam 14 is converged by the measured lens 7 and irradiated on the rear surface 6 of the parallel flat crystal;

[0057] (c) The measureme...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention belongs to the field of optical precision measurement technology and relates to a reflection cavity type differential confocal measuring method of super-large radius of curvature. According to the method, by a differential confocal focusing theory in cooperation with parallel optical flat, a focal position of a measured surface is positioned accurately so as to further realize high-precision measurement of super-large radius of curvature. The method combining the differential confocal focusing theory and a reflection cavity type folded optical path theory has advantages as follows: displacement distance of a measured piece is small; measurement precision is high; measuring speed is fast; environmental disturbance resistance is strong; and the measured surface is not damaged. The method provided by the invention can be used in high-precision non-contact measurement of super-large radius of curvature.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and can be used for the detection of super-large curvature radius and the high-precision measurement of super-large curvature radius in the assembly process of an optical system. technical background [0002] High-precision spherical elements are widely used in large-scale optical systems such as lithography machines, astronomical telescopes, and laser nuclear fusion. With the advancement of these system engineering, higher requirements have been put forward for the measurement of the curvature radius of spherical optical elements, especially the large curvature radius parameters. requirements. However, the measurement of the radius of curvature of large optical components has always been one of the difficult problems in the field of optics due to its low precision of fixed-focus aiming, long measurement path, and susceptibility to interference from environmental factors. I...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/255
Inventor 赵维谦张鑫王旭杨佳苗
Owner BEIJING INSTITUTE OF TECHNOLOGYGY