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A processing method for ultra-precision planar ceramic parts

A processing method and technology for ceramic parts, which are applied in metal processing equipment, machine tools with surface polishing, control of workpiece feed movement, etc. high precision effect

Active Publication Date: 2016-04-06
SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the high hardness, high wear resistance of ceramic materials and the limitations of conventional detection methods, it is not easy to process high-precision ceramic parts

Method used

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  • A processing method for ultra-precision planar ceramic parts
  • A processing method for ultra-precision planar ceramic parts

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Embodiment Construction

[0020] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings and the embodiments.

[0021] Reference figure 2 As shown, a method for processing ultra-precision flat ceramic parts includes the following steps:

[0022] Step 1) First, use natural or synthetic compounds to form and sinter at high temperature, and then grind and grind them to make the surface of the ceramic parts meet certain accuracy requirements;

[0023] Step 2) When the conventional measurement technology of mechanical processing cannot be detected, use the ultra-precision polishing system to polish the ceramic parts to improve the surface finish of the ceramic parts;

[0024] Step 3) When the finish reaches a certain level, that is, when the plane interferometer can detect the surface data of the entire ceramic part, the plane interferometer can be used to detect its surface accuracy;

[0025] Step 4) Finally, according to the detected surface data and characterist...

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Abstract

The invention discloses an ultra-precise plane machining method of ceramic piece of a ceramic piece. The ultra-precise plane machining method comprises the following steps that natural or synthetic compounds are formed and sintered at high temperature; the natural or synthetic compounds are grounded, and abrasive machining is performed on the natural or synthetic compounds to enable the surface shape of the ceramic piece to reach certain precision requirements; when the surface shape cannot be detected through machining conventional measurement technology, an ultra-precise polishing system is utilized to polish the ceramic piece to improve surface smoothness of the ceramic piece; when the surface smoothness of the ceramic piece reaches to certain degree, namely, a plane interferometer can detect out surface shape data of the whole ceramic piece, the surface shape data of the whole ceramic piece are detected through the plane interferometer; motion trail generated when next polishing is performed is planned according to the detected surface shape data and characteristics on the basis of digital fitting datum technology by means of relevant polishing process; the next machining is performed on the ceramic piece by means of the ultra-precise polishing system to enable the surface shape of the ceramic piece to reach higher precision requirements. Therefore, by means of the method, errors are reduced, precision is improved, and machining efficiency is increased.

Description

Technical field [0001] The invention belongs to the technical field of ultra-precision processing, and specifically relates to a processing method of ultra-precision planar ceramic parts. Background technique [0002] In the field of ultra-precision processing technology, in addition to the need to adopt new processing methods or new processing mechanisms, there are special requirements for workpiece materials, processing equipment, tools, measurement and environmental conditions. Ultra-precision processing methods and processes must cooperate with ultra-precision measurement technology to achieve the final high precision of the workpiece. Ceramic materials are a class of inorganic non-metallic materials made of natural or synthetic compounds through forming and high-temperature sintering. It has the advantages of high melting point, high hardness, high wear resistance, and oxidation resistance. It can be used as structural material and tool material. Because ceramics also have...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B29/02B24B49/12
CPCB24B29/02B24B49/12
Inventor 成贤锴刘斌
Owner SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI