A processing method for ultra-precision planar ceramic parts
A processing method and technology for ceramic parts, which are applied in metal processing equipment, machine tools with surface polishing, control of workpiece feed movement, etc. high precision effect
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[0020] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings and the embodiments.
[0021] Reference figure 2 As shown, a method for processing ultra-precision flat ceramic parts includes the following steps:
[0022] Step 1) First, use natural or synthetic compounds to form and sinter at high temperature, and then grind and grind them to make the surface of the ceramic parts meet certain accuracy requirements;
[0023] Step 2) When the conventional measurement technology of mechanical processing cannot be detected, use the ultra-precision polishing system to polish the ceramic parts to improve the surface finish of the ceramic parts;
[0024] Step 3) When the finish reaches a certain level, that is, when the plane interferometer can detect the surface data of the entire ceramic part, the plane interferometer can be used to detect its surface accuracy;
[0025] Step 4) Finally, according to the detected surface data and characterist...
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