Monolithic integrated micro-fluorescence analysis system and manufacturing method thereof

A fluorescence analysis, monolithic integration technology, applied in the field of fluorescence monitoring systems, can solve the problems of application requirements that are not suitable for miniaturization, large size, complex structure, etc., and achieve the effect of low production cost and analysis cost, and small system volume.

Active Publication Date: 2014-05-28
上海芯晨科技有限公司
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Problems solved by technology

The entire system is large in size, requires high alignment of optical paths between devices,

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  • Monolithic integrated micro-fluorescence analysis system and manufacturing method thereof
  • Monolithic integrated micro-fluorescence analysis system and manufacturing method thereof
  • Monolithic integrated micro-fluorescence analysis system and manufacturing method thereof

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[0063] The embodiments of the present invention are described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0064] see Figure 1a ~ Figure 7 . It should be noted that the drawings provided in this embodiment are only to illustrate the basic concept of the present invention in a schematic way, so the drawings only show the components related to the present invention rather than the number, shape and the number of components in actual implementation. For dimension drawing, the type, quantity and proportion of each component can be changed at will i...

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Abstract

The invention provides a monolithic integrated micro-fluorescence analysis system and a manufacturing method thereof. The micro-fluorescence analysis system comprises a silicon substrate, a sample cell, a light emitting device, a silicon detector and an integrated circuit, wherein the sample cell is formed in the silicon substrate or bonded on the surface of the silicon substrate; the light emitting device is formed in a first selective area of the silicon substrate, and one light emitting side of the light emitting device is opposite to the first side of the sample cell; the silicon detector is formed in a second selective area of the silicon substrate, and one light detecting surface of the silicon detector is opposite to the second side of the sample cell; the integrated circuit is formed in the silicon substrate and is used for processing a detection signal, driving an excitation light source, analyzing the signal and controlling signal output. The fluorescence analysis system is processed on a same silicon-based platform by virtue of a micro electro mechanical system (MEMS) processing technology and a complementary metal oxide semiconductor (CMOS) process, thus being extremely small in size and extremely low in manufacturing cost and analysis cost, and a lab on chip (LOC) is truly achieved.

Description

technical field [0001] The invention belongs to the field of fluorescence monitoring systems, and in particular designs a single-chip integrated micro-fluorescence analysis system realized by semiconductor manufacturing technology and a manufacturing method thereof. Background technique [0002] Fluorescence analysis refers to the qualitative and quantitative analysis method of the object by detecting the characteristics and intensity of the fluorescence produced by the fluorescent pigment of some object under the irradiation of excitation light. As biological and medical detection and environmental analysis, fluorescence analysis system is used for quantitative measurement at trace level due to its extremely high sensitivity and non-invasiveness. [0003] Among them, laser-induced fluorescence technology has extremely high sensitivity, but the disadvantages of high cost, large volume, and high energy consumption of lasers limit the application of laser-induced fluorescence ...

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Application Information

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IPC IPC(8): H01L21/8238B81C1/00G01N21/64
CPCG01N21/64H01L31/153H01L31/1804
Inventor 陈龙
Owner 上海芯晨科技有限公司
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