Monolithic integrated micro-fluorescence analysis system and manufacturing method thereof

Abstract

The invention provides a monolithic integrated micro-fluorescence analysis system and a manufacturing method thereof. The micro-fluorescence analysis system comprises a silicon substrate, a sample cell, a light emitting device, a silicon detector and an integrated circuit, wherein the sample cell is formed in the silicon substrate or bonded on the surface of the silicon substrate; the light emitting device is formed in a first selective area of the silicon substrate, and one light emitting side of the light emitting device is opposite to the first side of the sample cell; the silicon detector is formed in a second selective area of the silicon substrate, and one light detecting surface of the silicon detector is opposite to the second side of the sample cell; the integrated circuit is formed in the silicon substrate and is used for processing a detection signal, driving an excitation light source, analyzing the signal and controlling signal output. The fluorescence analysis system is processed on a same silicon-based platform by virtue of a micro electro mechanical system (MEMS) processing technology and a complementary metal oxide semiconductor (CMOS) process, thus being extremely small in size and extremely low in manufacturing cost and analysis cost, and a lab on chip (LOC) is truly achieved.

Description

technical field [0001] The invention belongs to the field of fluorescence monitoring systems, and in particular designs a single-chip integrated micro-fluorescence analysis system realized by semiconductor manufacturing technology and a manufacturing method thereof. Background technique [0002] Fluorescence analysis refers to the qualitative and quantitative analysis method of the object by detecting the characteristics and intensity of the fluorescence produced by the fluorescent pigment of some object under the irradiation of excitation light. As biological and medical detection and environmental analysis, fluorescence analysis system is used for quantitative measurement at trace level due to its extremely high sensitivity and non-invasiveness. [0003] Among them, laser-induced fluorescence technology has extremely high sensitivity, but the disadvantages of high cost, large volume, and high energy consumption of lasers limit the application of laser-induced fluorescence ...

AI Technical Summary

Problems solved by technology

The entire system is large in size, requires high alignment of optical paths between devices, and has a complex structure, which is not suitable for miniaturized application requirements.

Images