Vibration energy self-powered microsensor with cantilever beam opening in the radio frequency transceiver component of the Internet of Things
A radio frequency transceiver and micro-sensor technology, which is applied in the field of self-powered micro-sensors powered by cantilever beams with holes, can solve problems such as energy loss, and achieve the effects of improving loss, improving performance, and high collection efficiency
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[0016] The open-hole cantilever vibration energy self-powered microsensor in the radio frequency transceiver component of the Internet of Things of the present invention is based on a gallium arsenide substrate 4 and is composed of a main cantilever 1 and eight auxiliary cantilever beams 2 of the same size. One end of 1 is fixed on the gallium arsenide substrate 4 through the anchor region 3 of the main cantilever beam, and the anchor region of the secondary cantilever beam 2 is fabricated on the free edges on both sides of the main cantilever beam 1, and each side is distributed with Four secondary cantilever beams 2, the natural resonant frequency of each secondary cantilever beam 2 is different, by designing the radius of the circular hole 6 on the different secondary cantilever beams 2, the distance between the centers of the adjacent circular holes 6 and the number of holes, it can be Adjust the Young's modulus, Poisson's ratio and density of each secondary cantilever 2, s...
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